Ion Beam Figuring System for Synchrotron X-Ray Mirrors Achieving Sub-0.2-µrad and Sub-0.5-nm Root Mean Square  

作　　者：Tianyi Wang Lei Huang Yi Zhu Stefano Giorgio Philip Boccabella Nathalie Bouet Mourad Idir 

机构地区：[1]Brookhaven National Laboratory,National Synchrotron Light Source II(NSLS-II),PO Box 5000,Upton,NY,11973,USA

出　　处：《Nanomanufacturing and Metrology》2023年第3期1-11,共11页纳米制造与计量（英文）

基　　金：This work was supported by the Accelerator and Detector Research Program,part of the Scientific User Facility Division of the Basic Energy Science Office of the US Department of Energy(DOE),under the Field Work Proposal No.PS032;This research was performed at the Optical Metrology Laboratory at the National Synchrotron Light Source II,a US DOE Office of Science User Facility operated for the DOE Office of Science by Brookhaven National Laboratory(BNL)under Contract No.DE-SC0012704;This work was performed under the BNL LDRD 17-016‘Diffraction limited and wavefront preserving reflective optics development’.

摘　　要：Optics with high-precision height and slope are increasingly desired in numerous industrial fields.For instance,Kirkpatrick-Baez(KB)mirrors play an important role in synchrotron X-ray applications.A KB system is composed of two aspherical,grazing-incidence mirrors used to focus an X-ray beam.The fabrication of KB mirrors is challenging due to the aspherical departure of the mirror surfaces from base geometries and the high-quality requirements for slope and height residuals.In this paper,we present the process of manufacturing an elliptical cylinder KB mirror using our in-house-developed ion beam figuring(IBF)and metrology technologies.First,the key aspects of figuring and finishing processes with IBF are illustrated in detail.The effect of positioning error on the convergence of the residual slope error is highlighted and compensated.Finally,inspection and cross-validation using different metrology instruments are performed and used as the final validation of the mirror.Results confirm that relative to the requested off-axis ellipse,the mirror has achieved 0.15-μrad root mean square(RMS)and 0.36-nm RMS residual slope and height errors,respectively,while maintaining the initial 0.3-nm RMS microroughness.

关 键 词：Ion beam figuring Kirkpatrick-Baez Synchrotron X-ray mirrors Stitching interferometry Optical fabrication Optical metrology 

分 类 号：TB383[一般工业技术—材料科学与工程]