Design and Experimentation of a Novel Separable Vibration-Assisted Stage  

作　　者：Bowen Song Xiubing Jing Yingying Ren Yongqin Ren Huaizhong Li 

机构地区：[1]School of Mechanical Engineering,Tianjin University,Tianjin,300354,China [2]Key Laboratory of Ocean Observation Technology,Tianjin,300000,China [3]Griffith School of Engineering,Gold Coast Campus,Griffith University,Southport,QLD,4222,Australia

出　　处：《Nanomanufacturing and Metrology》2023年第3期41-50,共10页纳米制造与计量（英文）

基　　金：This research was supported by Program of Tianjin Science and Technology(No.21ZXJBGX00020);the National Natural Science Foundation of China(Nos.51875404,52175275).

摘　　要：In this paper,a novel,separable two-degrees-of-freedom stage with high-precision motion and resolution is proposed for the application of vibration-assisted micromilling.A separable design was realized on the basis of the detachable structure of the platform.Flexible stages with different dimensions and types can be utilized in the devices.A circular-fillet hinge is selected as the flexible unit with a parallel structure to realize output decoupling and reduce the coupling error between the two vibration directions.Analytical modeling is conducted to explore the static and dynamic characteristics of the stage.Results reveal a good agreement with the finite element simulation result.A series of experiments were conducted to assess the static and dynamic performances of the flexible stage,encompassing tests such as amplitude response,motion trajectory,and coupling trajectory.The results of these tests revealed that the designed vibration-assisted system exhibits precise movement capabilities.

关 键 词：Vibration-assisted machining MICROMILLING Symmetrically decoupling structure Flexible stage 

分 类 号：TB383[一般工业技术—材料科学与工程]