基于复合微凝胶薄膜的柔性电容式湿度传感器研究  

Research on Flexible Capacitive Humidity Sensor Based on Composite Microgel Films

作　　者：黎陈 胡亮 聂宝清 LI Chen;HU Liang;NIE Baoqing(School of Electronic Information,Soochow University,Suzhou Jiangsu 215006,China)

机构地区：[1]苏州大学电子信息学院,江苏苏州215006

出　　处：《传感技术学报》2023年第10期1509-1514,共6页Chinese Journal of Sensors and Actuators

基　　金：江苏省自然科学基金项目(BK20211308)。

摘　　要：近年来,柔性电子技术的快速发展使得湿度传感器广泛应用于人体健康监测、电子皮肤和非接触控制等新兴应用领域。不同于传统的刚性湿度传感器,柔性湿度传感器因具有舒适的可穿戴性、成本低和制作工艺简单等特点备受研究者的关注。然而,探索一种理想的传感材料来改善柔性湿度传感器的性能仍然是目前存在的挑战。开发了一种简单、低成本且可扩展的制造方法,构建了基于聚(N-异丙基丙烯酰胺-共-丙烯酸)/聚二甲基二烯丙基氯化铵(P(NIPAm-co-AAc)/PDADMAC)复合微凝胶薄膜的柔性电容式湿度传感器。实验证明,该湿度传感器具有较宽的湿度检测范围(20%~90%RH)、高灵敏度(5.06%/%RH)、快速的响应/恢复时间(3.5 s/2.5 s)、良好的重复性以及长期稳定性。其出色的湿度传感性能和高度柔韧性在用于人体健康监测的柔性可穿戴设备中具有很大前景。In recent years,the rapid development of flexible electronic technology has enabled humidity sensors to be widely used in emerging applications such as human health monitoring,electronic skin,and noncontact control.Different from traditional rigid humidity sensors,flexible humidity sensors have attracted the attention of researchers due to their comfortable wearability,low cost and simple fabrication process.However,exploring an ideal sensing material to improve the performance of flexible humidity sensors remains a chal lenge.A simple,lowcost,and scalable fabrication method is developed to construct a flexible capacitive humidity sensor based on Poly(Nisopropylacrylamidecoacrylic acid)/Poly dimethyl diallyl ammonium chloride(P(NIPAmcoAAc)/PDADMAC)composite microgel films.Experiments show that the humidity sensor has a wide humidity detection range(20%-90%RH),high sensitivity(5.06%/%RH),fast response/recovery time(3.5 s/2.5 s),and good repeatability as well as longterm stability.Its excellent humidity sensing performance and high flexibility hold great promise in flexible wearable devices for human health monitoring.

关 键 词：柔性 湿度传感器 电容式 微凝胶 湿度检测 

分 类 号：TP212.3[自动化与计算机技术—检测技术与自动化装置] TB943[自动化与计算机技术—控制科学与工程]