产生环形激光的光学系统设计  

Design of an optical system for generating ring-shaped laser beam

作　　者：陈宝华[1] 吴泉英[1] 唐运海 范君柳[1] 陈晓翌 余浩墨 孙毅 CHEN Bao-hua;WU Quan-ying;TANG Yun-hai;FAN Jun-liu;CHEN Xiao-yi;YU Hao-mo;SUN Yi(Jiangsu Key Laboratory of Micro and Nano Heat Fluid Flow Technology and Energy Application,School of Physical Science and Technology,Suzhou University of Science and Technology,Suzhou 215009,China;Suzhou Mason Optical Co.Ltd.,Suzhou 215127,China;Graduate Practice Station in Soochow Mason Optics Co.Ltd.,Suzhou 215127,China)

机构地区：[1]苏州科技大学物理科学与技术学院江苏省微纳热流技术与能源应用重点实验室,江苏苏州215009 [2]苏州明世光学科技有限公司,江苏苏州215127 [3]江苏省研究生工作站苏州苏大明世光学股份有限公司,江苏苏州215127

出　　处：《中国光学（中英文）》2023年第6期1365-1375,共11页Chinese Optics

基　　金：国家自然科学基金资助项目(No.62275187,No.61875145,No.11804243);江苏省十四五光学工程重点学科项目资助(No.2021135);苏州市产业前瞻与关键核心技术项目资助(No.SYC2022145);苏州市重点实验室(No.SZS201202)。

摘　　要：为了产生半径可自由调控的聚焦环形激光且确保离焦后光束强度仍均匀,本文提出一种透射-反射式组合的环形光光学系统设计方法。对于透射式系统,基于等能量分割原理,建立入射光与出射光投射高度的映射函数,优化透镜的各项参数,将入射的高斯光先整形成平顶圆形光,实现光束强度均匀化。反射式系统通过调整焦面环形光直径调控范围、工作距离等参数,结合几何光线追迹原理,计算圆锥反射镜、抛物柱面镜及动镜的各项参数,将平顶圆形光再整形成环形光。实验结果表明:当动镜半顶角为16°时,所设计系统能够实现聚焦环形光半径在15~30 mm范围的自由调控,尺寸误差不超过0.05 mm,离焦后强度均匀度达到84%。该设计方法无需更换系统镜片即可兼顾强度均匀性和尺寸自由度,可操作性好,产生的环形光加工精度和效率更高。We present a method for designing a transmissive-reflective combined optical system to generate a focused ring-shaped laser beam.The design aims to achieve a freely adjustable radius for the focused ring-shaped laser beam and ensure uniform beam intensity even after defocusing.Based on the principle of equal energy splitting,the transmissive system establishes mapping functions for the input and output light projection height.It optimizes the lens parameters to shape the incident Gaussian light into a flat-topped circular shape,thus achieving uniformity of beam intensity.On the other hand,the reflective system uses the adjustable diameter range of the focal plane ring-shaped light and working distance parameters.By applying the principle of geometric ray tracing,it calculates the parameters of the conical reflecting mirror,parabolic cylindrical mirror,and dynamic mirror,then the flat-topped circular light is transformed into a ring-shaped light.The experimental results show that when the half-apex angle of the dynamic mirror is 16°,the designed system can achieve a freely adjustable radius for the focused ring-shaped laser beam from 15 mm to 30 mm with a size error not more than 0.05 mm,and the intensity uniformity after defocusing reaches 84%.The design method can achieve both uniformity of intensity and freedom of size adjustment without replacing the system lens.It has good operability and yields higher precision and efficiency in the processing of ring-shaped light.

关 键 词：光学系统 环形激光 半径调控 离焦均匀 

分 类 号：O439[机械工程—光学工程]