数字微镜器件光谱成像技术进展  

Progress in spectral imaging technology of digital micromirror devices

作　　者：石颖超 张路明 陈飞 苑伟政[1,2] 虞益挺 SHI Yingchao;ZHANG Luming;CHEN Fei;YUAN Weizheng;YU Yiting(College of Mechanical and Electrical Engineering,Ningbo Institute of Northwestern Polytechnical University,Xi'an 710072,China;Key Laboratory of Micro/Nano Systems for Aerospace(Ministry of Education),Key Laboratory of Micro and Nano-Electro-Mechanical Systems of Shaanxi Province,Northwestern Polytechnical University,Xi'an 710072,China)

机构地区：[1]西北工业大学宁波研究院机电学院,陕西西安710072 [2]西北工业大学空天微纳系统教育部重点实验室陕西省微纳机电系统重点实验室,陕西西安710072

出　　处：《光学精密工程》2023年第21期3096-3110,共15页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.51975483,No.52205603);宁波市自然科学基金资助项目(No.202003N4033)。

摘　　要：数字微镜器件(DMD)作为一种灵活、可编程、可独立寻址的空间光调制器件,广泛地应用于无掩膜光刻、光束整形、全息成像、共焦测量等领域。在光谱成像领域,DMD能够对成像视场进行精细可控的调制,从而代替传统的机械掩膜版和机械扫描结构。综述了近年来DMD在光谱成像领域的研究进展和应用情况,详细论述了基于DMD的编码孔径和推扫式光谱成像系统的光学系统基本结构及工作原理;梳理了基于DMD的光谱成像系统从哈达玛变换光谱成像到推扫式光谱成像的发展脉络;详细介绍了研究人员为克服DMD微镜的衍射以及像面倾斜等像差所做的相关研究工作。最后,总结了基于DMD的光谱成像技术的独特优势,讨论了基于DMD的光谱成像技术未来的发展方向与应用前景。In recent years,digital micromirror device(DMD),as a flexible,programmable,and indepen-dently addressable spatial light modulation device,has been widely used in maskless lithography,beam shaping,holographic imaging,confocal measurement,and other fields.The flexible modulation mode al-so gives DMD unique advantages in spectral imaging.It can flexibly modulate the imaging field of view,replacing the traditional mechanical mask and scanning structure.In this study,DMD′s research progress and application in spectral imaging in recent years was reviewed.The basic structure and working principle of the optical system of the aperture-coded and push-broom spectral imaging system based on DMD were discussed in detail and the development of a spectral imaging system based on DMD from Hadamard trans-form spectral imaging to push-broom spectral imaging was summarized.The relevant research work to overcome the DMD′s diffraction owing to the micro-mirror and inclination of the image plane was intro-duced.Finally,The unique advantages of spectral imaging technology based on DMD was summarized and the future development direction and application prospect of spectral imaging technology based on DMD was discussed.

关 键 词：数字微镜器件 光谱成像 编码孔径 哈达玛变换 推扫式 

分 类 号：TP731[自动化与计算机技术—检测技术与自动化装置] TH745[自动化与计算机技术—控制科学与工程]