基于SSA-LT光学参数优化的测厚系统设计  

Design of Thickness Measurement System Based on SSA-LT Optical Parameter Optimization

作　　者：程瑶 石肖伊 田又源 刘云阳 贾宁 CHENG Yao;SHI Xiaoyi;TIAN Youyuan;LIU Yunyang;JIA Ning(College of Mechanical Engineering,Chongqing University of Technology,Chongqing 400054,China;China Electronics Technology Group Corporation,Chongqing 401332,China)

机构地区：[1]重庆理工大学机械工程学院,重庆400054 [2]中国电子科技集团有限公司,重庆401332

出　　处：《仪表技术与传感器》2023年第10期47-51,共5页Instrument Technique and Sensor

基　　金：国家青年科学基金项目(61901068);重庆市科委基础与前沿研究一般项目(cstc2016jcykA0497);重庆市基础研究与前沿探索专项一般项目(cstc2020jcyj-msxmX0425,CSTB2022NSCQ-MSX0950)。

摘　　要：为提高现代制造业的测量精度和效率,减少废品率、提高测量效率,解决传统接触式测厚带来的误差、对工件造成的损害等问题,文中基于激光三角法测厚原理,采用智能优化算法优化光学系统参数,设计实时、在线、非接触式测厚系统,从而实现对工件的实时、高精度的测量。通过实验验证了系统的可行性,该系统采用10 mm的测量量程,测量误差不超过±8.45μm,均方差小于1.21μm,说明该系统的测量精度较高,实现了降低工件废品率、提升测厚的有效性和准确性的目标,提高了高端工件厚度测量精度。In order to improve the measurement accuracy and efficiency of modern manufacturing industry,reduce the scrap rate,improve the measurement efficiency,and solve the problems of error and damage to the workpiece caused by the traditional contact thickness measurement,in this paper,based on the principle of direct laser triangulation thickness measurement,the intelligent optimization algorithm(SSA)was used to optimize the parameters of the optical system and a real-time,online,non-contact thickness measurement system was designed,so as to achieve real-time,high-precision measurement of the workpiece.The feasibility of the system was verified through experiments.The system adopted a measurement range of 10 mm,and the measurement error was less than±8.45μm,while the mean square deviation was less than 1.21μm,which indicated that the system has high measurement accuracy,realizing the reduction of workpiece scrap rate and the improvment of the effectiveness and accuracy of thickness measurement,and improving the thickness measurement accuracy of high-end workpieces.

关 键 词：非接触式测厚 激光三角法 麻雀搜索算法 测量精度 

分 类 号：TH741[机械工程—光学工程]