基于微平面线圈构建的位移量磁调制技术研究  

Research on Displacement Magnetic Modulation Technique Based on Microplane Coil Construction

作　　者：党永迪 刘昌荣 徐大诚[1] DANG Yongdi;LIU Changrong;XU Dacheng(School of Electronic Information,Soochow University,Suzhou 215000,China)

机构地区：[1]苏州大学电子信息学院,江苏苏州215000

出　　处：《仪表技术与传感器》2023年第10期121-126,共6页Instrument Technique and Sensor

摘　　要：在微系统中,利用惯性原理测量位移信号常用的方法是基于磁通聚集技术,即采用TMR传感器将位移信号的变化转换成磁场的变化进行测量。针对该方法,以位移磁调制模型为研究对象,以微平面线圈为磁场源,从理论方面深入研究磁感应强度与微平面线圈电流、匝数和磁通聚集器间距以及调制膜位移量的关系并进行优化设计与实验验证。仿真表明,磁通调制膜与TMR的直线距离在3μm和5μm时,分别能实现4.88 Gs/μm和2.72 Gs/μm的最大灵敏度。In microsystems,the commonly used method of measuring displacement signal by using inertia principle was based on flux aggregation technology,that is,the change of displacement signal was converted into the change of magnetic field by using TMR sensor.Aiming at this method,the paper took the displacement magnetic modulation model as the research object and the micro-plane coil as the magnetic field source.From the theoretical aspect,the relationship between the magnetic induction intensity and the current,the number of turns of the micro-plane coil,the distance between the magnetic flux collector and the displacement of the modulation film was deeply studied,and the optimization design and experimental verification were carried out.Simulation results show that when the linear distance between the flux modulated membrane and TMR is 3μm and 5μm,the maximum sensitivity of 4.88 Gs/μm and 2.72 Gs/μm can be achieved,respectively.

关 键 词：TMR传感器 微平面线圈 磁通聚集器 磁噪声 位移磁调制 高灵敏度 

分 类 号：TH822[机械工程—仪器科学与技术]