基于2μm激光二极管和Herriott多光程吸收池的高灵敏二氧化碳气体传感器(特邀)  

Highly Sensitive Carbon Dioxide Gas Sensor Based on 2μm Laser Diode and Herriott Multi-pass Absorption Cell(Invited)

作　　者：王成龙 谢嘉保 庄若彬 林灏杨 林乐晴 崔茹悦 武红鹏 郑华丹 董磊[2] WANG Chenglong;XIE Jiabao;ZHUANG Ruobin;LIN Haoyang;LIN Leqing;CUI Ruyue;WU Hongpeng;ZHENG Huadan;DONG Lei(Department of Optoelectronic Engineering,College of Science and Technology,Jinan University,Guangzhou 510632,China;State Key Laboratory of Quantum Optics and Quantum Optics Devices,Institute of Laser Spectroscopy,Shanxi University,Taiyuan 030006,China)

机构地区：[1]暨南大学理工学院光电工程系,广州510632 [2]山西大学量子光学与光量子器件国家重点实验室,太原030006

出　　处：《光子学报》2023年第10期70-79,共10页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.62375111,62005105,12174156,12174155,62105125,62075088,62175137);国家重点研发计划(Nos.2021YFB2800801,2019YFE0118200);广东省自然科学基金(Nos.2020B1515020024,2019A1515011380);广东省重点领域研发计划(No.2019B010138004);广东高校优秀青年创新人才培养计划项目(No.2018KQNCX009);广州市科技项目(No.202102020445);中国航空研究院项目(No.201808W4001);广州市产业领军人才项目(No.CXLJTD-201607);中央高校基本科研专项资金(Nos.21619402,11618413);应用光学国家重点实验室基金(No.SKLAO-201914);广东省科技创新战略专项资金(No.pdjh2023a0052)。

摘　　要：为了提高二氧化碳气体检测系统的测量空间分辨率并减小系统体积,设计了一种基于2μm激光二极管和Herriott多光程吸收池的高灵敏二氧化碳气体传感器。设计并加工了有效光程为2.6 m的Herriott池来进行光路折叠。使用中心波长为2μm的激光二极管,覆盖二氧化碳分子在4989.9 cm^(-1)处的较强吸收线。采用波长调制技术减小系统的噪声。此外,为系统加载Kalman滤波技术来进一步提高探测灵敏度。实验结果表明,采用该传感器,系统的探测极限在1 s的积分时间下可达到0.18×10^(-6),而经过自编程实时Kalman滤波后探测极限可达到0.13×10^(-6),提高了27%。采用该传感器对室内二氧化碳浓度进行长达8 h的连续监测,并在暨南大学理工学院楼顶进行了24 h的二氧化碳浓度监测,证明了仪器的稳定性。The measurement of carbon dioxide plays a very important role in breath diagnostics,monitoring industrial safety,monitoring greenhouse gases,observing industrial chemical reactions,measuring combustion completeness,and avoiding fires.Tunable Diode Laser Absorption Spectroscopy(TDLAS)technology has the advantages of high selectivity,high sensitivity,and strong anti-interference ability.The TDLAS systems with a multi-pass cell increase the minimum detection limit by increasing the length of the absorption path.Increasing the absorption path has strict requirements on the divergence characteristics of the laser,and requires enough space.By designing the multi-pass absorption cell,the requirements on optical beam quality can be reduced.The volume of the system can be compressed,and the spatial resolution of the measurement can be improved.In this paper,a highly-sensitive carbon dioxide gas sensor based on a 2μm laser diode and a Herriott multi-pass absorption cell is designed.The basic parameters of the Herriott multi-pass absorption cell are calculated by paraxial approximation.The solution includes the incident position and the incident angle of the incident light,and the distance between the two spherical concave mirrors.According to the simulation results,a Herriott type multi-path absorption cell is fabricated.The multi-pass cell can fold the optical path with an optical path length of 2.6 m within a length of 54 mm.The minimum detection limit of the system is related to the absorption line intensity of the selected absorption peak.In order to reduce the cost of the system,a distributed feedback laser diode with a center wavelength of 2.004μm is used to cover the strong absorption line of carbon dioxide molecules at 4989.9 cm^(-1).The second harmonic signal with zero background noise at the detection frequency can be detected by 2f-wavelength modulation spectroscopy technology.This technique effectively reduces the noise of the system.The signal measured by the system has white noise,and the method of signal a

关 键 词：光谱学 可调谐二极管激光吸收光谱技术 多光程池 Herriott池 二氧化碳传感器 

分 类 号：O433[机械工程—光学工程]