基于电磁诱导透明的人工表面等离激元片上传感器(特邀)  

Spoof Plasmonic On-chip Sensor Based on Electromagnetically Induced Transparency(Invited)

作　　者：苏晓强 黄宇聪 李绍限 宋歌 许全 SU Xiaoqiang;HUANG Yucong;LI Shaoxian;SONG Ge;XU Quan(College of Physics and Electronic Science,Shanxi Province Key Laboratory of Microstructure Electromagnetic Functional Materials,Shanxi Datong University,Datong 037009,China;MOE Engineering Research Center of Smart Microsensors and Microsystems,School of Electronics and Information,Hangzhou Dianzi University,Hangzhou 310018,China;Center for Terahertz Waves and College of Precision Instrument and Optoelectronics Engineering,Tianjin University,Tianjin 300072,China)

机构地区：[1]山西大同大学物理与电子科学学院微结构电磁功能材料省市共建山西省重点实验室,大同037009 [2]杭州电子科技大学电子信息学院智能微传感器与微系统教育部工程研究中心,杭州310018 [3]天津大学精密仪器与光电子工程学院太赫兹研究中心,天津300072

出　　处：《光子学报》2023年第10期92-100,共9页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.62005193,61935015);山西省基础研究计划项目(No.202203021211328);光电信息技术教育重点实验室(天津大学)开放基金(No.2023KFKT015);山西省留学回国人员科技活动择优资助项目(No.20230037)。

摘　　要：利用排布在人工表面等离激元传输线两侧的微结构谐振组实现了波导类电磁诱导透明(Electromagnetically Induced Transparency,EIT)效应,并基于此开发了结构紧凑的片上传感器。根据电场分布的特性,发现片上类EIT效应的传感工作机理主要是利用暗模谐振器内部的强局域化电场对周围介质的敏感程度,能够反映到EIT特征频率的偏移量和谐振幅度的变化。进一步地,详细仿真了待测物的折射率、正切损耗、厚度、半径等参数变化对EIT透明窗口的响应规律,发现该片上传感器在1.26~1.79折射率变化范围下的灵敏度可达1.12 GHz/RIU,传感品质因数值为5.45。实验中通过对三种食用油进行传感测量,验证了所提出的基于类EIT效应的片上传感器具有高灵敏度、无标记检测和实验灵活的特点。Spoof Surface Plasmon Polaritons(SSPPs)are a surface electromagnetic modes of the lowfrequency regime with characteristics similar to those of surface plasmons in the optical regime.By altering the geometric parameters of the metal structure,the localized electromagnetic field can be manipulated,enabling its significant role in various fields such as on-chip communication,signal processing,and sensing detection.Herein,we propose a novel strategy to achieve the refractive index sensor on chip.The classical two-side metallic stripes are utilized as SSPP waveguide,and two types of meta-particles with diverse Qfactors and identical resonant frequencies are employed as a bright-dark module along the propagating trajectory of the waveguide structure.Due to the near-field interactions between resonant modes of metaparticles and the evanescent field of waveguide,Electromagnetically Induced Transparency(EIT)effect is achieved on planar SSPP waveguide.The working frequency is 6.03 GHz and Q-factors can be up to 28.575.Due to the characteristics of the electric-field distribution at the EIT-like peak frequency,a compact refractive-index sensor on-chip is developed.The sensing mechanism of the on-chip EIT-like effect primarily relies on the sensitivity of the strongly confined electric-field inside the dark mode resonators to the refractive-index of surrounding medium.This sensitivity can be reflected into the shift of the EIT-like characteristic frequency and changes in the resonance amplitude.The circular analyte is chosen as the study object and positioned above the center of the dark mode resonators.The full-wave simulations are conducted to investigate the response characteristics of the EIT transparency window to variations in parameters such as the refractive index n,tangent loss tanσ,thickness th,and radius r of the analytes.The increase of refractive index n contributes to redshift of EIT window,which show the linear relationship and the slope is described as the sensitivity of sensor on-chip.As the thickness th an

关 键 词：人工表面等离激元 电磁诱导透明 片上系统 折射率传感 近场耦合 

分 类 号：O439[机械工程—光学工程]