片上中红外铟镓砷悬浮波导气体传感器  

On-chip Mid-infrared Indium Gallium Arsenic Suspended Waveguide Gas Sensors

作　　者：王雪莹 张哲宁 皮明权 彭子航 郑传涛 宋芳 杨悦 王一丁 WANG Xueying;ZHANG Zhening;PI Mingquan;PENG Zihang;ZHENG Chuantao;SONG Fang;YANG Yue;WANG Yiding(State Key Laboratory of Integrated Optoelectronics,Jilin University Region,College of Electronic Science and Engineering,Jilin University,Changchun 130012,China;Jilin Provincial Engineering Research Center of Infrared Gas Sensing Technique,Changchun 130012,China)

机构地区：[1]吉林大学电子科学与工程学院集成光电子学国家重点联合实验室吉林大学实验区,长春130012 [2]吉林省红外气体传感技术工程研究中心,长春130012

出　　处：《光子学报》2023年第10期159-169,共11页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.62175087,62235016,61960206004,62105118);吉林省科技发展计划(Nos.20200401059GX,20230201054GX);吉林省教育厅科技发展规划项目(No.JJKH20211088KJ);长春市重点研发项目(No.21ZGN24);吉林大学科技创新团队项目(Nos.JLUSTIRT,2021TD-39)。

摘　　要：为研究中红外波段的片上波导传感性能,针对2172.75 cm-1处的一氧化碳吸收线,提出基于InGaAs-InP平台的悬浮光子晶体波导传感器和悬浮脊形波导传感器。基于朗伯—比尔定律,通过Rsoft和COMSOL软件设计波导结构,优化了光子晶体波导的晶格常数、孔半径、中心孔半径和脊形波导的脊宽、条宽、脊高和条高。仿真结果表明,光子晶体波导和脊形波导的功率限制因子分别为250.69%和115.65%。对两种传感器进行计算和性能评估,得到两种传感器的传输损耗分别为27.5 dB/cm和3 dB/cm,最佳波导长度分别为72μm和162μm。设定探测器最小可检测信噪比为10,得到两种传感器的最小可检测气体浓度分别为9.13×10-6和8.51×10-6。讨论了波导传输损耗对传感器性能的影响,若能有效降低波导损耗,可进一步降低最小可检测气体浓度。对比两种传感器,光子晶体波导具有更大的功率限制因子,脊形波导具有低传输损耗和横磁模兼容性的优点。Most gas molecules have vibration characteristic absorption peaks in the mid-infrared spectral range(2.5~20μm),which can be used for trace gas detection and quantitative analysis.On-chip gas sensing that enables waveguide interconnection can improve system portability.Because quantum cascade laser and quantum cascade detector material structures can be epitaxially grown on the InGaAs-InP platform,it can be used for the preparation of on-chip integrated gas sensors.On the InGaAs-InP platform,the refractive indices of nInGaAs=~3.4 and nInP=~3.1 atλ=4.6025μm are insufficient to realize the total internal reflection constraint between core and substrate.We can etch the InP substrate by using hydrochloric acid so that the refractive index between the core and cladding is approximately 2.4.At this point,the suspension structure allows gas to flow through the upper and lower cladding,allowing stronger interaction between gas molecules and light.In order to study the sensing performance of on-chip waveguide in the mid-infrared band,a suspended photonic crystal waveguide and a suspended ridge waveguide sensor based on InGaAs-InP platform are proposed for targeting the 2172.75 cm−1 absorption line of carbon monoxide.Based on Lambert-Beer law,Rsoft software and COMSOL software are used to optimize the waveguide structure.The lattice constant,hole radius,central hole radius,ridge width,strip width,ridge height and strip height of the photonic crystal waveguide are optimized,and the performances of the two sensors are calculated.Firstly,a mid-infrared suspended InGaAs-InP photonic crystal waveguide sensor is proposed.The InGaAs photonic crystal waveguide adopts a hexagonal lattice with a lattice constant of a.The width of Holey Photonic Crystal Waveguide(HPCW)is 3 a,and the thickness of InGaAs layer hInGaAs is 1.15μm.The lattice constant,hole radius and central hole radius parameters of the photonic crystal waveguide are optimized by constructing a defect row in theΓ-K direction.The central defect row radius of the con

关 键 词：波导传感器 中红外 吸收光谱 气体传感器 光子晶体波导 脊形波导 

分 类 号：TN252[电子电信—物理电子学]