不确定度至E-5量级的微牛级力值计量装置研究  

An Instrument for Micro-Newton Force Measurement with Uncertainty in E-5

作　　者：张凯[1] 白洋[1] 张智敏[1] ZHANG Kai;BAI Yang;ZHANG Zhimin(National Institute of Metrology,Beijing 100029,China)

机构地区：[1]中国计量科学研究院,北京100029

出　　处：《计量科学与技术》2023年第7期34-39,33,共7页Metrology Science and Technology

基　　金：中国计量科学研究院重点领域项目(AKYZD2005);中国计量科学研究院基本科研业务费项目(AKYCX2302)。

摘　　要：微牛级力值的测量技术广泛应用于空间探测、生物材料分析与微纳制造等领域的研究。基于静电力天平原理,设计并搭建了一套用于微牛级力值测量的装置,针对前期研究中测量装置的铅垂向刚度过大和圆柱形电容器同轴度对准误差较大的问题,通过优化设计四边形柔性枢轴的结构降低了系统在铅垂向的刚度,提升了静电力天平的力值分辨力,并基于圆柱形电容器的电容特性实现了对内、外电极同轴度的校准。经过实验测量,设计的微牛级力值计量装置具备了将100μN力值的测量不确定度控制在E-5量级的能力。此项研究成果将为微牛级力值测量基准装置的建立和微牛级力值量传方法的研究做出重要贡献。Micro-newton force measurement technology,extensively employed in the domains of space exploration,biomaterials analysis,and micro-nano manufacturing,plays a pivotal role.This study presents a device constructed based on the principle of electrostatic force balance,aimed at measuring micro-newton force values.Addressing the issues encountered in preliminary research,such as excessive stiffness in the vertical direction and significant alignment error of cylindrical capacitors,structural optimization of quadrilateral flexible pivots was undertaken to diminish system stiffness vertically,thereby enhancing the force resolution of the electrostatic force balance.Additionally,calibration of the concentricity of the inner and outer electrodes was achieved based on the capacitance characteristics of cylindrical capacitors.Experimental assessments revealed that the devised micro-newton force measurement device adeptly confines the measurement uncertainty of 100μN force values to the E-5 level.The outcomes of this research are poised to significantly contribute to the establishment of micro-newton force measurement standard devices and further research on micro-newton force measurement methodologies.

关 键 词：计量学 普朗克常数 静电力天平 微牛级力值 柔性枢轴 圆柱形电容器 

分 类 号：TB931[一般工业技术—计量学]