基于PLC和MCGS的超高灵敏度检漏仪控制系统设计  

Design of ultra⁃high sensitivity leak detector control system based on PLC and MCGS

作　　者：刘筱文[1] 王毅[1] 蔡宇宏[1] 韩仙虎 李正清[1] 李小金[1] 马凤英 LIU Xiaowen;WANG Yi;CAI Yuhong;HAN Xianhu;LI Zhengqing;LI Xiaojin;MA Fengying(Lanzhou Institute of Physics,CAST,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所,甘肃兰州730000

出　　处：《现代电子技术》2023年第23期178-182,共5页Modern Electronics Technique

摘　　要：真空器件的寿命主要取决于封装结构的极小漏率,为了保证真空器件的真空寿命,通常需要其封装结构具有极小的漏率。针对极小漏率的超高灵敏度检测,文中设计了基于PLC和MCGS的控制系统,通过工控机与PLC之间的Modbus通信以及与质谱计之间的OPC通信,实现了超高灵敏度检漏仪各部件的自动控制和底层数据的采集交换,提高了超高灵敏度检漏仪的灵敏度和自动化水平。系统上位机由MCGS组态软件实现账户登录、数据导出、曲线动态显示等功能。主程序及功能模块程序由PLC控制执行,提高了设备的可靠性,同时提高了检测效率,减少了检漏操作人员的劳动强度,减小了误操作的可能性。The lifetime of vacuum devices mainly depends on the minimum leakage rate of packaging structure.Usually,it is required that the packaging structure has a minimal leakage rate,so as to ensure enough vacuum life for vacuum devices.Therefore,a control system based on PLC(programmable logic controller)and MCGS is designed for the ultra⁃high sensitivity detection of the minimal leakage rate.By the Modbus communication between the industrial personal computer and the PLC and the OPC communication between the industrial personal computer and the mass spectrometer,the automatic control of the components of the leak detector with ultra⁃high sensitivity and the acquisition and exchange of the underlying data are realized,and the sensitivity and automation level of the leak detector with ultra⁃high sensitivity are improved.The upper computer of the system realizes the functions of account login,data export and curve dynamic display by MCGS configuration software.The main program and the function module program are controlled and executed by PLC,which improves the reliability of the equipment and its detection efficiency.The labor intensity of leak detection operators is reduced,and the possibility of their misoperations is minimized.

关 键 词：PLC MCGS OPC MODBUS 检漏仪 控制系统 组态软件 自动控制 

分 类 号：TN876-34[电子电信—信息与通信工程]