同时制备多个透射电镜截面试样的离子减薄方法  

Ion thinning method for simultaneous preparation of multiple TEM cross-section samples

作　　者：张革 崔云[1,2] 赵娇玲[1,2] 王涛[1,2] 赵元安[1,2] ZHANG Ge;CUI Yun;ZHAO Jiaoling;WANG Tao;ZHAO Yuan’an(Laboratory of Thin Film Optics,Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences,Shanghai 201800,China;Key Laboratory of Materials for High Power Laser,Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences,Shanghai 201800,China)

机构地区：[1]中国科学院上海光学精密机械研究所薄膜光学实验室,上海201800 [2]中国科学院上海光学精密机械研究所强激光材料重点实验室,上海201800

出　　处：《理化检验（物理分册）》2023年第10期27-29,33,共4页Physical Testing and Chemical Analysis(Part A:Physical Testing)

基　　金：国家自然科学基金中物院联合基金(U1930119);中国科学院青年创新促进会人才项目(2020253);上海市科技计划项目(21DZ1100400)。

摘　　要：试样制备是透射电镜表征的关键,而传统的离子减薄方法效率低下,难以满足大批量的测试需求。以单晶硅基底上沉积的极紫外多层膜为例,介绍了一种同时制备多个透射电镜截面试样的离子减薄方法。结果表明:该方法不仅缩短了离子减薄的时间,还缩短了透射电镜装取试样与抽真空的时间。The preparation of the sample was the key to the characterization of the transmission electron microscope,and the traditional ion thinning method was inefficient and difficult to meet the needs of large-scale testing.Taking the extreme ultraviolet multilayer film deposited on a single crystal silicon substrate as an example,an ion thinning method for preparing multiple transmission electron microscope cross-section samples at the same time was introduced.The results show that this method not only shortened the time of ion thinning,but also shortened the time of transmission electron microscope loading and vacuuming.

关 键 词：透射电镜 薄膜 离子减薄 试样制备 

分 类 号：TG115.2[金属学及工艺—物理冶金] TB383[金属学及工艺—金属学]