碲锌镉衬底表面处理研究  

Surface Processing of Cadmium Zinc Telluride Substrates

作　　者：江先燕 丛树仁[1] 宁卓 起文斌 刘燕[1] 宋林伟[1] 孔金丞[1] JIANG Xianyan;CONG Shuren;NING Zhuo;QI Wenbin;LIU Yan;SONG Linwei;KONG Jincheng(Kunming Institute of Physics,Kunming 650223,China)

机构地区：[1]昆明物理研究所,云南昆明650223

出　　处：《红外技术》2023年第11期1242-1255,共14页Infrared Technology

摘　　要：主要从碲锌镉表面处理工艺及表面位错缺陷揭示两个方面对碲锌镉衬底的表面处理研究进行了详细介绍。从表面处理机理和工艺参数对衬底表面的影响两个方面介绍了机械研磨、机械抛光、化学机械抛光以及化学抛光4种表面处理工艺。同时,介绍了能揭示碲锌镉不同晶向表面的位错缺陷的Everson、Nakagawa及EAg三种化学腐蚀液。In this study,the surface processing of cadmium zinc telluride(CZT)substrates was studied,which revealed surface dislocation defects.The surface processing mechanism and influence of the process parameters on the surface of the CZT substrates,including mechanical grinding,mechanical polishing,chemical mechanical polishing,and chemical polishing,are presented.Moreover,three types of chemical etchants,Everson,Nakagawa,and EAg,which reveal dislocation defects on the surface of CdZnTe with different crystal orientations,were also investigated.

关 键 词：碲锌镉(CZT) 表面处理 位错揭示 

分 类 号：TN213[电子电信—物理电子学]