高损伤阈值激光薄膜的制备方法  

Review of preparation methods of laser films with high damage threshold

作　　者：袁世豪 徐均琪[1] 苏俊宏[1] 卢嘉锡 任森 YUAN Shihao;XU Junqi;SU Junhong;LU Jiaxi;REN Sen(Shaanxi Province Thin Films Technology and Optical Test Open Key Laboratory,Xi'an Technological University,Xi'an 710021,China)

机构地区：[1]西安工业大学陕西省薄膜技术与光学检测重点实验室,陕西西安710021

出　　处：《应用光学》2023年第6期1185-1194,共10页Journal of Applied Optics

基　　金：国家自然科学基金(62205263)。

摘　　要：近年来,随着大功率、高能量激光系统的不断发展,光学薄膜的抗激光能力成为制约激光系统高质量发展的瓶颈之一。基于不同的制备方法及工艺参数会对薄膜的损伤阈值产生重要的影响,就薄膜镀制前、镀制中以及镀制后三个方面对提高损伤阈值的方法进行综述,其中包括膜料优选、膜系设计、溶剂清洗、离子束清理、制备方法、离子束后处理、激光后处理等内容。In recent years,with the demand and development of high-power and high-energy laser systems,the anti-laser capability of optical films has become one of the bottlenecks restricting the development of highquality laser systems.Based on the different preparation methods and process parameters,the damage threshold of the film will have an important impact.The methods for improving the damage threshold of the film before,during and after plating were briefly introduced,including the film material selection,membrane system design,solvent cleaning,ion beam cleaning,preparation method,ion beam post-processing,laser pretreatment,and etc.

关 键 词：光学薄膜 激光损伤阈值 激光系统 沉积方式 

分 类 号：TN241[电子电信—物理电子学] O484.4[理学—固体物理]