Acousto-optic scanning spatial-switching multiphoton lithography  

作　　者：Binzhang Jiao Fayu Chen Yuncheng Liu Xuhao Fan Shaoqun Zeng Qi Dong Leimin Deng Hui Gao Wei Xiong 

机构地区：[1]Wuhan National Laboratory for Optoelectronics and School of Optical and Electronic Information,Huazhong University of Science and Technology,Wuhan,Hubei 430074,People’s Republic of China [2]Optics Valley Laboratory,Wuhan,Hubei430074,People’s Republic of China

出　　处：《International Journal of Extreme Manufacturing》2023年第3期597-606,共10页极端制造（英文）

基　　金：National Key Research and Development Program of China(2021YFF0502700);National Natural Science Foundation of China(52275429,62205117);Innovation project of Optics Valley Laboratory(OVL2021ZD002);Hubei Provincial Natural Science Foundation of China(2022CFB792);Young Elite Scientists Sponsorship Program by CAST(2022QNRC001);West Light Foundation of the Chinese Academy of Sciences(xbzg-zdsys-202206);Knowledge Innovation Program of Wuhan-Shuguang。

摘　　要：Nano-3D printing has obtained widespread attention owing to its capacity to manufacture end-use components with nano-scale features in recent years.Multiphoton lithography(MPL)is one of the most promising 3D nanomanufacturing technologies,which has been widely used in manufacturing micro-optics,photonic crystals,microfluidics,meta-surface,and mechanical metamaterials.Despite of tremendous potential of MPL in laboratorial and industrial applications,simultaneous achievement of high throughput,high accuracy,high design freedom,and a broad range of material structuring capabilities remains a long-pending challenge.To address the issue,we propose an acousto-optic scanning with spatial-switching multispots(AOSS)method.Inertia-free acousto-optic scanning and nonlinear swept techniques have been developed for achieving ultrahigh-speed and aberration-free scanning.Moreover,a spatial optical switch concept has been implemented to significantly boost the lithography throughput while maintaining high resolution and high design freedom.An eight-foci AOSS system has demonstrated a record-high 3D printing rate of 7.6×10^(7)voxel s^(-1),which is nearly one order of magnitude higher than earlier scanning MPL,exhibiting its promise for future scalable 3D nanomanufacturing.

关 键 词：3D nano-printing acousto-optic scanning aberration-free wavefront spatial-switching 

分 类 号：TB383.1[一般工业技术—材料科学与工程] TP391.73[自动化与计算机技术—计算机应用技术]