一种常温转高温气路穿板转接接头  

A Kind of Normal Temperature to High Temperature Gas Line through the Plate Adapter Connector

作　　者：高翔 Gao Xiang(Zhongke Aier(Beijing)Technology Co.,Ltd.,Beijing 101100,China)

机构地区：[1]中科艾尔(北京)科技有限公司,北京101100

出　　处：《机械管理开发》2023年第11期101-102,105,共3页Mechanical Management and Development

摘　　要：穿板接头多用于气、水、电缆通过板材,然而传统穿板接头由于大多数接头本体与卡套接头连接,无法实现高温向常温气路转换,而且传统穿板接头距离受到限制无法实现长距离的转换输送。基于此,针对不易解决的技术难题设计一种常温转高温气路穿板转接接头,该接头能够满足高纯气体穿板的输送,同时满足高温向常温的气路转换,可以在半导体集成气柜气路接线领域中应用。Bulkhead joints are mostly used for gas,water,cable through the plate,however,the traditional Bulkhead joints are unable to realise the conversion from high temperature to room temperature gas path due to most of the joints are connected to the ferrule joints,and the distance of the traditional Bulkhead joints is limited to achieve the conversion of long-distance transport.Therefore,in view of the technical difficulties that are not easy to be solved,a normal temperature to high temperature gas path through the plate adapter is designed,which can meet the delivery of high purity gas through the plate,and at the same time meet the high temperature to normal temperature gas path conversion,and can be applied in the field of semiconductor integrated gas cabinet gas path wiring.

关 键 词：气路转换 半导体气路 高纯气体 

分 类 号：TH744.1[机械工程—光学工程]