TiN_(0.3)/AlN复合烧结界面扩散现象  

Interfacial diffusion in TiN_(0.3)/AlN composite

作　　者：邹芹[1,2] 孙俊绒 李艳国 罗永安[2] ZOU Qin;SUN Junrong;LI Yanguo;LUO Yong`an(School of Mechanical Engineering,Yanshan University,Qinhuangdao 066004,Hebei,China;Metastable Materials Science and Technology State Key Laboratory,Yanshan University,Qinhuangdao 066004,Hebei,China)

机构地区：[1]燕山大学机械工程学院,河北秦皇岛066004 [2]燕山大学,亚稳材料制备技术与科学国家重点实验室,河北秦皇岛066004

出　　处：《金刚石与磨料磨具工程》2023年第5期537-545,共9页Diamond & Abrasives Engineering

基　　金：河北省高等学校科学技术研究项目资助项目(ZD2021099)。

摘　　要：为研究TiN_(0.3)/AlN复合烧结体中两相界面区域的N原子的扩散现象,通过机械合金化方法制备出非化学计量比TiN_(0.3),采用放电等离子体烧结技术分层及复合烧结TiN_(0.3)/AlN复合材料,采用金相、XRD、SEM、EDS及TEM等分析表征TiN_(0.3)/AlN复合材料的物相组成、元素分布和组织形貌。结果表明:AlN中的N通过空位扩散机制向TiN_(0.3)中扩散,其扩散程度逐渐减弱;与AlN接触的TiN_(0.3)部分由于吸收了来自AlN中的N使成分接近正常比例的TiN,而远离界面处的部分则接近TiN_(0.3)的成分;在两相结合区域有宽度在1 nm以下的非晶层,其电子衍射斑点出现纵向伸长,产生共格,说明六方结构的AlN晶格向TiN晶格畸变,形成面心立方结构的TiN_(0.3)/AlN。In recent years,extensive research has been conducted on nano-multilayer films of TiN/AlN system.However,there are few reports on its bulk composites.In this study,non-stoichiometric TiN_(0.3) was prepared by mechanical alloying,then TiN_(0.3)/AlN composites were fabricated through spark plasma sintering(SPS)utilizing both layered and mixed sintering techniques.The phase composition,element distribution and microstructure of TiN_(0.3)/AlN composites were characterized by metallography,XRD,SEM,EDS and TEM,to study the diffusion of N atoms in the interface region of TiN_(0.3)/AlN composites.The results show that N in AlN diffuses into TiN_(0.3) through a vacancy diffusion mechanism,The area of TiN_(0.3) in contact with AlN absorbs N from AlN to make the composition close to the normal proportion of TiN,while the area"far away"from the interface is close to the component of TiN_(0.3),and its diffusion degree weakens gradually.In the two-phase bonding region,there is a thin amorphous layer whose width is less than 1 nm.The electron diffraction pattern elongates longitudinally and produces coherent lattice.The AlN lattice of hexagonal structure is distorted to TiN lattice,forming TiN_(0.3)/AlN with a face-centered cubic structure.

关 键 词：TiN/AlN复合材料 放电等离子体烧结 界面扩散 共格 

分 类 号：TB383.3[一般工业技术—材料科学与工程]