LiF掺杂对ZnO-TiO_(2)系陶瓷的结构和微波介电性能的影响  

Effect of LiF doping on the structure and microwave dielectric properties of ZnO-TiO_(2)ceramics

作　　者：温梦涛 张效华 侯维帅 张佩 朱剑锋 岳振星 WEN Mengtao;ZHANG Xiaohua;HOU Weishuai;ZHANG Pei;ZHU Jianfeng;YUE Zhenxing(School of Materials Science and Engineering,Shaanxi University of Science&Technology,Xi'an710021,China;State Key Laboratory of New Ceramics and Fine Processing,School of Materials Science and Engineering,Tsinghua University,Beijing100084,China)

机构地区：[1]陕西科技大学材料科学与工程学院,陕西西安710021 [2]清华大学材料学院新型陶瓷与精细工艺国家重点实验室,北京100084

出　　处：《电子元件与材料》2023年第10期1209-1216,共8页Electronic Components And Materials

基　　金：国家自然科学基金(52273315);陕西省教育厅科技项目(21JT003);清华大学新型陶瓷与精细工艺国家重点实验室开放课题(KF202212);景德镇市科技计划项目(20192GYZD008-17)。

摘　　要：微波器件的高频化、片式化和多功能化是通信技术中重要的发展方向,超低损耗(高Q值)的低温烧结微波介质陶瓷是LTCC技术的关键材料,其中ZnO-TiO_(2)系微波介质陶瓷备受关注。通过固相反应法,选用氟化锂(LiF)作为烧结助剂,对ZnO-TiO_(2)系陶瓷进行掺杂烧结。研究LiF对其烧结行为、相热稳定性和微波介电性能的影响。分析表明:一定量的LiF掺杂能够将ZnO-TiO_(2)陶瓷的烧结温度从1100℃降低到1020℃左右;对于不同LiF掺杂量的ZnO-TiO_(2)陶瓷,其物相均为Zn_(2)TiO_(4)尖晶石和TiO_(2)金红石的复合相组成;当掺杂LiF为质量分数1%时,1065℃烧结的陶瓷样品具有最优的微波介电性能:εr=27,Q×f=21300 GHz,τf=43.2×10^(-6)/℃。High frequency,chip and multi-functional microwave devices are important development directions for communication technology.Ultra-low loss(high Q)microwave dielectric ceramics are critical materials for low-temperature sintered ceramic(LTCC)technology.Among them,ZnO-TiO_(2)microwave dielectric ceramics have attracted much attention.Here,lithium fluoride(LiF)was selected as a sintering aid and dopant for ZnO-TiO_(2)ceramics by solid-phase reaction method.The effects of LiF were investigated on its sintering behavior,phase-thermal stability and microwave dielectric properties.Analysis show that a certain amount of LiF doping can reduce the sintering temperature of ZnO-TiO_(2)ceramics from 1100℃to about 1020℃.At different dopant level,the phases are all composed of Zn_(2)TiO_(4)spinel and TiO_(2)rutile.At dopant level x=1%,the ceramic sintered at 1065℃have optimal microwave dielectric properties ofεr=27,Q×f=21300 GHz,andτf=43.2×10^(-6)/℃.

关 键 词：微波介质陶瓷 ZnO-TiO_(2) LIF 微波介电性能 

分 类 号：TQ174[化学工程—陶瓷工业]