基于3D打印的隧道磁阻加速度计研究  

Research on tunnel magnetoresistive accelerometer based on 3D printing

作　　者：陈新茹 杨波[1,2] CHEN Xinru;YANG Bo(School of Instrument Science and Engineering,Southeast University,Nanjing 210096,China;Key Laboratory of Micro-Inertial Instrumentation and Advanced Navigation Technology,Ministry of Education,Southeast University,Nanjing 210096,China)

机构地区：[1]东南大学仪器科学与工程学院,江苏南京210096 [2]东南大学微惯性仪表与先进导航技术教育部重点实验室,江苏南京210096

出　　处：《传感器与微系统》2023年第12期25-28,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(61874025)。

摘　　要：由于隧道磁阻(TMR)效应具有高灵敏度优势,被用于加速度的检测,设计了一种基于3D打印的TMR加速度计。首先,根据线性加速度计的工作原理,推导出输入加速度与输出位移的关系,同时通过对永磁体数学模型的分析得出永磁体周围磁场强度变化率与位移变化的关系;接着,根据TMR效应的原理,设计加速度计整体架构,实现加速度—位移—磁场—电压的转换;随后,设计加速度计机械结构,进行机械结构仿真优化与磁场仿真分析,确定结构参数和布局方式;最后,设计了TMR加速度计测控电路,进行电路仿真和实验验证。实验测试数据显示,该TMR加速度计标度因数为161.1 mV/gn。Since the tunnel magnetoresistance(TMR)effect has the advantage of high sensitivity,it is applied to the detection of acceleration,and a tunnel magnetoresistance accelerometer based on 3D printing is designd.Firstly,according to the working principle of the linear accelerometer,the relationship between the input acceleration and the output displacement is deduced.At the same time,the relationship between the change rate of the magnetic field intensity around the permanent magnet and the displacement change is obtained by analyzing the mathematical model of the permanent magnet.Then,according to the principle of TMR effect,the overall structure of the accelerometer is designed to realize the conversion of acceleration-displacement-magnetic field-voltage.Next,the mechanical structure of the accelerometer is designed,and the mechanical structure simulation optimization and magnetic field simulation analysis are carried out to determine the structural parameters and layout.Finally,the measurement and control circuit of the TMR accelerometer is designed,and the circuit simulation and experimental verification are carried out.The experimental test data shows that the scale factor of the TMR accelerometer is 161.1 mV/gn.

关 键 词：隧道磁阻效应 加速度计 永磁体 测控电路 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]