基于压电效应的光电子集成技术研究进展(特邀)  

Research Progress in Optoelectronics Integration Technology Based on Piezoelectric Effect(Invited)

作　　者：沈健[1] 冯成龙 张洵[1] 张磊[1] 舒畅 张永[1] 苏翼凯[1] SHEN Jian;FENG Chenglong;ZHANG Xun;ZHANG Lei;SHU Chang;ZHANG Yong;SU Yikai(Department of Electronic Engineering,State Key Lab of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]上海交通大学区域光纤通信网与新型光通信系统国家重点实验室电子工程系,上海200240

出　　处：《光子学报》2023年第11期1-22,共22页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.62335014,61975115,61835008)。

摘　　要：压电效应是一种实现电能与机械能之间相互转换的重要物理现象。随着集成光电子技术和压电薄膜材料制备技术的日益成熟,压电效应在光电子集成芯片领域引起广泛的研究。在压电效应的作用下,外部电场可以操控薄膜材料的形变,从而改变折射率,实现光电调谐和声光调制。本文首先介绍常见压电薄膜材料及其研究进展,随后回顾和探讨基于压电效应的光电子集成器件的研究进展。最后,对压电调谐器件和声光调制器的应用进行介绍和展望,分析其大规模应用面临的挑战和问题。Optical communication and interconnection technology utilize photons instead of electrons as information carrier,enabling large-capacity and high-speed information transmission.Silicon-based photonics integrated circuits are expected to promote the breakthroughs for the optoelectronics chips in the“post-Moore era”due to its advantages of small size,high integration,low power consumption,and compatibility with the Complementary Metal Oxide Semiconductor(CMOS)process.So far,optoelectronic integrated chips based on silicon platforms have achieved tremendous success in industries such as coherent optical communication.However,central symmetric structures represented by silicon lack linear and high-order nonlinear effects,posing a natural disadvantage in the design and fabrication of low-power tuning devices,high-speed modulation devices,and nonlinear devices.In order to meet the low-power-consumption,high-efficiency,and large-scale integration requirements for the next generation of optoelectronic integrated chips,it is necessary to explore new effects and new thin-film materials for the development of integrated optoelectronic devices.Piezoelectric effect is an important physical phenomenon that realizes the conversion between electrical energy and mechanical energy.Some specific crystalline materials generate positive and negative charges when external mechanical force or pressure is applied,creating an electric field.When an external electric field is applied to these crystalline materials,they undergo deformation,resulting in a change in refractive index.Thanks to the progress and maturity of thin film growth and deposition techniques such as Atomic Layer Deposition(ALD)and Molecular Beam Epitaxy(MBE),many low-loss,high-piezoelectric-coefficient thin films have been prepared and realized,such as aluminum nitride(AlN),lead zirconate titanate(PZT),hafnium dioxide(HfO2),lithium niobate(LN),etc.Optical tuning based on the piezoelectric effect is a consequence of the electric field influence.Compared to thermos-op

关 键 词：硅基光电子学 压电效应 可调谐器件 声光调制器 光电子集成芯片 

分 类 号：TN256[电子电信—物理电子学]