高温陶瓷薄膜热流传感器动态响应有限元分析  

Finite Element Simulation of Dynamic Response of High Temperature Ceramic Thin-Film Heat Flux Sensor

作　　者：张梅菊[1,3] 郭怡雪 黄漫国 杜子睿[2] 康志鹏 张丛春 ZHANG Meiju;GUO Yixue;HUANG Manguo;DU Zirui;KANG Zhipeng;ZHANG Congchun(AVIC Beijing Changcheng Aeronautical Measurement and Control Technology Research Institute,Beijing 101111,China;Department of Micro/Nano FElectronics,Schoo of Electronie Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai 200241,China;Aviaton Key Laboratory of Science and Technology on Spatial Condition Monitoring Sensor Technology,Beijing 101111,China)

机构地区：[1]航空工业北京长城航空测控技术研究所,北京101111 [2]上海交通大学电子信息与电气工程学院微纳电子学系,上海200241 [3]状态监测特种传感技术航空科技重点实验室,北京101111

出　　处：《测控技术》2023年第11期1-5,39,共6页Measurement & Control Technology

摘　　要：航空、航天等领域的高速发展对精密热流测量技术提出了更严苛的挑战。ITO/In_(2)O_(3)陶瓷材料相比贵金属材料有着更高的塞贝克系数,并拥有低密度和优异的高温力学性能。基于有限元仿真方法,建立了ITO/In_(2)O_(3)热电堆型薄膜热流传感器热电学仿真模型,设计了2种薄膜热流传感器结构,综合分析了热电堆在不同的热阻层分布、热阻层厚度和热流密度下的传热性能和输出动态响应变化,提出了ITO/In_(2)O_(3)薄膜热流传感器的优化设计方案。The rapid development of aviation,aerospace and other fields has posed more and more severe chal-lenges to the precise measurement of heat flux.Compared with noble metal materials,ITO/In_(2)O_(3) materials have higher Seebeck coefficient,lower density and excellent mechanical properties at high temperature.Based on the finite element simulation method,the thermoelectric model of ITO/In_(2)O_(3) thin-film heat flux sensor is estab-lished,and two kinds of thin-film heat flux sensor structures are designed.The heat transfer performance and output dynamic response of the thermopile with different layer distribution,thickness of thermal resistance and heat flux density are comprehensively analyzed.The optimized design of ITO/In_(2)O_(3) thin-film heat flux sensor is proposed.

关 键 词：高温 薄膜热流传感器 ITO/In_(2)O_(3)热电堆 有限元分析 动态响应 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]