1064 nm半导体可饱和吸收镜的特性  

Characteristics of 1064 nm Semiconductor Saturable Absorber Mirror

作　　者：张秋月 林楠[1] 黄婷 刘素平[1] 马骁宇[1] 熊聪[1] 仲莉[1] 张志刚[3] Zhang Qiuyue;Lin Nan;Huang Ting;Liu Suping;Ma Xiaoyu;Xiong Cong;Zhong Li;Zhang Zhigang(National Engineering Research Center for Optoelectronic Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;College of Materials Science and Optoelectronics,University of Chinese Academy of Sciences,Beijing 100049,China;School of Electronics Engineering and Computer Science,Peking University,Beijing 100871,China)

机构地区：[1]中国科学院半导体研究所光电子器件国家工程研究中心,北京100083 [2]中国科学院大学材料科学与光电技术学院,北京100049 [3]北京大学信息科学技术学院,北京100871

出　　处：《光学学报》2023年第22期208-215,共8页Acta Optica Sinica

基　　金：国家重点研发计划(2022YFB3606200,2022YFB4601201)。

摘　　要：为了提高应用于光纤激光器的多量子阱半导体可饱和吸收镜(SESAM)的特性参数,对其结构进行优化,模拟分析了不同量子阱周期数对器件电场分布、调制深度及反射光谱等参数的影响,结果表明,SESAM中吸收层量子阱周期数越大,SESAM在1064 nm处的反射率越低,调制深度越高,在低反射率处的带宽越窄,可饱和吸收镜对生长误差的容忍度也越小。利用金属有机化合物气相沉积(MOCVD)方法对3种量子阱周期数结构的SESAM进行外延生长,通过非线性测试及锁模实验对3种结构的样品进行测量与表征,结果表明,3种结构的SESAM均实现了自启动锁模,其稳定锁模的泵浦区间为150~200 mW。采用泵浦探测技术对15个量子阱周期的SESAM进行动态响应测试,其响应恢复时间为5 ps。Objective A semiconductor saturable absorber mirror(SESAM)has the advantages of self-starting,easy integration,wide wavelength coverage,support for all-solid-state laser technology,fast saturation,compact structure,and flexible design.It has become a Q-switched and mode-locked element for various types of lasers such as solid-state,fiber,and semiconductor lasers.Recently,the rapid development of picosecond Yb-doped fiber lasers and their wide application in industrial processing have heightened interest in SESAM applied to Yb-doped fiber lasers.The technology of designing and epitaxial growing SESAM has been relatively mature abroad,and the development of SESAM has been carried out in China in recent years,but the research on SESAM devices in China mainly focuses on solid-state lasers,and there are few reports on the development and characterization of SESAM for fiber lasers.In the present study,we report the effects of the quantum well period numbers in the absorption region on the field distribution,modulation depth,and reflection spectrum of SESAM,and the key characteristic parameters of SESAM are characterized,which has important reference value for the further study of SESAM.Methods In order to improve the characteristic parameters of multi-quantum well semiconductor saturable absorption mirror(SESAM)for fiber lasers,the effects of different quantum well period numbers on the field distribution,modulation depth,and reflection spectrum of the device were analyzed.The epitaxial growth of three kinds of quantum well structures with different period numbers of 7,15,and 30 quantum wells was carried out by metal-organic compound vapor deposition(MOCVD)method.The reflectance spectra of the samples were measured by spectrophotometer,and the nonlinear test and mode-locking experiments were carried out on the developed three kinds of SESAM structures.The dynamic response of SESAM structures was tested by pump detection technology.Results and Discussions The simulation calculates the electric field distribution of the

关 键 词：激光器 超快激光器 半导体可饱和吸收镜 泵浦探测 

分 类 号：TN248.1[电子电信—物理电子学]