霍尔角位移测量精度分析与应用  

Hall angular displacement measurement accuracy analysis and application

作　　者：陈星燎 Chen Xingliao(Intelligent Manufacturing College,Tianjin Sino-German University of Applied Sciences,Tianjin 300350,China)

机构地区：[1]天津中德应用技术大学智能制造学院,天津300350

出　　处：《国外电子测量技术》2023年第10期154-161,共8页Foreign Electronic Measurement Technology

基　　金：天津市自然科学基金(21JCYBJC00670)项目资助。

摘　　要：非接触式磁电角度测量装置在工业复杂环境领域获得广泛应用。针对阀门行业复杂恶劣的应用环境以及测角精度在4°内的要求,开发了赫姆霍兹线圈驱动的霍尔传感器测量角度测量装置,理论分析了磁场不均匀性、线圈空间安装位置以及垂直误差、传感器灵敏度、霍尔器件通道非线性度、两通道相对非线性度、通道信噪比、安装角度偏差等因素对角度测量误差的影响,推导出误差上界等于等效安装角度误差与等效相对非线性度之和,两通道相对非线性度对误差影响极大。通过仿真和实验数据验证了上述分析的正确性,实测角位移的标准偏差为±0.4°,与理论预测值接近,满足工程应用需求。Non-contact magnetoelectric angle measuring devices are widely used in complex industrial environments.In view of the complex and harsh application environment of the valve industry and the requirement of angle measurement accuracy within 4°,the Hall sensor angle measuring device driven by Helmholtz coil was developed,and the influence of magnetic field inhomogeneity,coil space installation position and vertical error,sensor sensitivity,Hall device channel nonlinearity,channel relative nonlinearity,channel signal-to-noise ratio,installation angle deviation and other factors on angle measurement error was theoretically analyzed,and the upper bound of the error was derived to be equal to the sum of the equivalent installation angle error and the equivalent relative nonlinearity.The relative nonlinearity of the two channels has a great influence on the error.The correctness of the above analysis is verified by simulation and experimental data,and the standard deviation of the measured angular displacement is±0.4°which is close to the theoretical prediction value and meets the application requirements.

关 键 词：角位移测量 精度分析 霍尔传感器 

分 类 号：TH712[机械工程—测试计量技术及仪器]