基于原子力显微镜的压痕技术及其应用  

Atomic Force Microscope Based Indentation Techniques and Their Applications

作　　者：王晓萌 高扬 WANG Xiaomeng;GAO Yang(Center for X-Mechanics,School of Aeronautics and Astronautics,Zhejiang University,Hangzhou 310027,Zhejiang,China;Key Laboratory of Soft Machines and Smart Devices of Zhejiang Province,Hangzhou 310027,Zhejiang,China)

机构地区：[1]浙江大学航空航天学院,交叉力学中心,浙江杭州310027 [2]浙江省软体机器人与智能器件研究重点实验室,浙江杭州310027

出　　处：《高压物理学报》2023年第6期42-56,共15页Chinese Journal of High Pressure Physics

基　　金：国家自然科学基金(12102386,12192211)。

摘　　要：基于原子力显微镜的压痕技术具有高分辨、高精度等优点,是表征材料力学性质的重要手段,在材料科学、纳米科学、生物力学等领域具有广泛应用。首先,介绍了原子力显微镜及相关压痕技术的基本工作原理;然后,回顾总结了基于原子力显微镜的压痕技术在低维材料、软材料等领域的应用;接着,简要综述了原子力显微镜技术在二维材料高压相变方面的最新研究进展,着重介绍基于原子力显微镜的新型埃压痕技术,该技术可施加亚纳米级压痕深度,有效表征与调控二维材料的层间耦合作用;最后,对基于原子力显微镜的压痕技术在未来的发展和应用进行了展望。Indentation techniques based on atomic force microscopy(AFM)have been widely used in characterizing the mechanical properties of various types of materials,due to their high lateral resolution and vertical precision.This review article begins with a concise introduction to the fundamental principles of AFM and related indentation techniques.Subsequently,it extensively discusses and reviews the applications of AFM-based indentation techniques in measuring the mechanical properties of low-dimensional materials,biological materials,etc.This article also reviews the latest progress of the applications of AFM in the research of high-pressure phase transition in two-dimensional materials.Particularly,we introduce a novel angstrom-indentation technique,which enables atomic-level deformation on the samples.Angstrom-indentation allows for highly effective characterization and tuning of the interlayer coupling in two-dimensional materials.Finally,we make an outlook on the development of AFM-based indentation techniques.

关 键 词：原子力显微镜 压痕技术 二维材料 高压相变 

分 类 号：O521.3[理学—高压高温物理] O521.2[理学—物理]