激光辅助车削工艺参数对单晶硅表面质量的影响  

Effect of Machining Parameters on Surface Quality of Single Crystal Silicon in Laser-assisted Turning

作　　者：郭彦军 杨晓京[1] 姚同 康杰 李茂忠 GUO Yanjun;YANG Xiaojing;YAO Tong;KANG Jie;LI Maozhong(Faculty of Mechanical and Electrical Engineering,Kunming University of Science and Technology,Kunming 650500;Yunnan KIRO Photonics Co.Ltd,Kunming 650217)

机构地区：[1]昆明理工大学机电工程学院,昆明650500 [2]云南北方光学科技有限公司,昆明650217

出　　处：《宇航材料工艺》2023年第6期64-68,共5页Aerospace Materials & Technology

基　　金：国家自然科学基金(51765027);昆明理工大学分析测试基金(2020P20191103002)。

摘　　要：为了提高单晶硅激光辅助车削加工表面质量,通过开展激光辅助和常规车削加工试验,结合表面粗糙度、表面形貌及拉曼光谱检测,研究激光辅助车削技术对加工质量的影响。基于正交试验方法,研究单晶硅激光辅助车削工艺参数对表面粗糙度的影响;通过方差分析和极差分析评估各因素对表面粗糙度的影响。研究结果表明:与常规车削相比,激光辅助车削可有效提高加工表面质量,降低材料表面的残余应力。主轴转速、进给速度、切削深度和脉冲占空比对表面粗糙度的贡献率分别为17.51%、44.48%、6.69%和14.70%。确定最佳加工参数组合如下:主轴速度为4000 r/min,进给速度为2 mm/min,切削深度为5μm,脉冲占空比为30%,最终获得表面粗糙度Rq为2.4 nm的高质量表面。In order to improve the surface quality of single crystal silicon after single-point diamond turning,this paper investigates the influence of laser-assisted turning(LAT)technology on machining quality by analyzing surface roughness,surface morphology and Raman spectroscopy of samples prepared by LAT and conventional turning(CT),respectively.Based on the orthogonal test method,the LAT process parameters of single-crystal silicon were investigated on surface roughness.The influence of each factor on surface roughness was evaluated by variance analysis and range analysis.The results show that LAT can effectively improve machined surface quality and reduce residual stress on material surface compared with CT.The contribution proportions of spindle speed,feed rate,cutting depth and pulse duty cycle to surface roughness were 17.51%,44.48%,6.69%and 14.70%,respectively.Finally,the optimal combination of machining parameters was determined to be:spindle speed of 4000 r/min,feed rate of 2 mm/min,cutting depth of 5μm,and pulse duty cycle of 30%,with a high-quality surface with a surface roughness(Rq)of 2.4 nm was finally obtained.

关 键 词：单晶硅 激光辅助车削 正交试验 表面质量 最佳加工参数 

分 类 号：TG47[金属学及工艺—焊接]