新型柔性湿度传感器的研究进展  

Research Progress of New Flexible Humidity Sensors

作　　者：陈文宇 孙敏娜 王力 王志刚 周天 秦雷[1,2] CHEN Wenyu;SUN Minna;WANG Li;WANG Zhigang;ZHOU Tian;QIN Lei(Beijing Key Laboratory for Sensors,Beijing Information Science&Technology University,Beijing 100192,China;School of instrument Science and Opto-Electronics Engineering,Beijing Information Science&Technology University,Beijing 100192,China;China Mobile Park Construction and Development Co.,Ltd.,Beijing 102200,China)

机构地区：[1]北京信息科技大学北京市传感器重点实验室,北京100192 [2]北京信息科技大学仪器科学与光电工程学院,北京100192 [3]中移园区建设发展有限公司,北京102200

出　　处：《传感器世界》2023年第10期1-7,共7页Sensor World

基　　金：国家自然科学基金(No.U2006218,22004009,62101055,62201065);北京市属高等学校高水平科研创新团队建设支持计划项目(No.BPHR20220124);北京信息科技大学“勤信人才”培育计划资助(No.QXTCP A202103)。

摘　　要：由于可穿戴电子传感器、软机器人、电子皮肤等产业的飞速发展,柔性湿度传感器作为其中不可或缺的柔性器件发挥着重要的作用,因此各行业对其湿度检测的准确性、稳定性提出了更高的要求。文章介绍了传统柔性湿度传感器和新型柔性湿度传感的性质、制备方法以及感湿性能,并且对它们进行对比与分析,同时分析了传统和新型柔性湿度传感器的优缺点,进而总结出柔性湿度传感器的湿度感知能力的影响因素。最后提出一些可以改善湿敏元件性能的方法。Due to the rapid development of wearable electronic sensors,soft robots,electronic skin and other industries,flexible humidity sensors play an important role as the indispensable flexible devices therein,and thus various industries have put forward higher requirements for the accuracy and stability of their humidity detection.The paper mainly introduced the traditional flexible humidity sensor and the new type of humidity sensor.By introducing the nature,preparation method,and moisture sensing performance of traditional and new humidity sensors,and comparing and analyzing them,as well as analyzing the advantages and disadvantages of traditional and new flexible humidity sensors,and then summarizing the influencing factors of the humidity sensing ability of flexible humidity sensors.Finally,the methods to improve the performance of the humidity sensor were proposed.

关 键 词：柔性湿度传感器 石墨烯类 凝胶类 纤维素类 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]