用于雪崩光电探测器响应度增强的超透镜设计与仿真  

Design and Simulation of Metalens for Enhanced Responsivity of Avalanche Photodetectors

作　　者：初光辉 杨国皓 刘天宏 李晋平 常卫杰 范鑫烨[1] 佟存柱 CHU Guanghui;YANG Guohao;LIU Tianhong;LI Jinping;CHANG Weijie;FAN Xinye;TONG Cunzhu(School of Physics Science and Information Engineering,Liaocheng University,Liaocheng 252059,China;State Key Laboratory of Luminescence and Applications,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;School of Mechanical Engineering and Automation,Fuzhou University,Fuzhou 350108,China)

机构地区：[1]聊城大学物理科学与信息工程学院,山东聊城252059 [2]中国科学院长春光学精密机械与物理研究所,发光学及应用国家重点实验室,吉林长春130033 [3]福州大学机械工程与自动化学院,福建福州350108

出　　处：《发光学报》2023年第12期2250-2257,共8页Chinese Journal of Luminescence

基　　金：国家重点研发计划(2018YFB2201000);国家自然科学基金(6230030591)。

摘　　要：超透镜除了可以实现传统透镜的聚焦和成像功能之外,还可通过对超构单元的设计实现对光场偏振、波长和振幅等的多维度操控,由于体积薄、重量轻、成本低、易集成,其在光电子器件领域中开始崭露头角,已经成为当前的研究热点和重要方向。本文采用时域有限差分算法(Finite‐difference time‐domain,FDTD)设计并优化了基于InGaAs雪崩探测器原位集成的超透镜,同时估算了超透镜的聚焦效率和透射率。仿真结果表明,超透镜将入射光会聚至探测器的光敏区中,透射率达到82.8%,并且在目标焦距150μm、超透镜半径50μm时聚焦效率达到84.89%。为进一步提高透射率,在超透镜表面增加抗反射层(AR Layer)。结果表明,300 nm的SiO_(2)层透射率达到最大值86.6%,250 nm的SiN层透射率达到最大值87.6%,透射率比未增加AR层时分别增加了3.8%和4.8%。最后计算得出集成超透镜的探测器吸收区光场能量比未集成超透镜的探测器吸收区光场能量提升了250.96倍,将极大提升探测器的响应度。本文提出了单片集成超透镜的雪崩探测器设计方案,将雪崩探测器光敏区之外的入射光会聚至光敏区,在不损失带宽前提下提升探测器的量子效率,为高响应度、带宽雪崩探测器的设计提供了新思路。In addition to the focusing and imaging functions,Metalens can also manipulate light field polarization,wavelength,and amplitude through kinds of meta-units.Due to the small size,light weight,low cost and easy integration,Metalens has become a research hotspot and important trend in optoelectronic integration area.In this paper,finite-difference time-domain(FDTD)algorithm is used to design and optimize Metalens based on in⁃situ integration of InGaAs avalanche detectors,and the focusing efficiency and transmittance of the Metalens are calculated.The simulation results show that the Metalens converges incident light into the absorption layer of detector,the transmittance reaches 82.8%,and the focusing efficiency reaches 84.89%when the target focal length is 150μm and the Metalens radius is 50μm.To further increase the transmittance,an anti-reflection(AR)layer is added.The resultsshow that the maximum transmittance is 86.6%and 87.6%for 300 nm SiO_(2)and 250 nm SiN.Compared with the Metalens without AR layer,the max transmittance increased by 3.8%and 4.8%,respectively.Finally,it is estimat‐ed that the energy of the light field in the absorption region integrated with Metalens is 250.96 times higher than that of the detector without Metalens,which can greatly improve the responsivity of detector.This paper proposes a mono‐lithic integrated method for avalanche detector with Metalens,which can concentrate the energy outside the detection area into absorption area,improves the quantum efficiency of detector without bandwidth reduction.This will provide a new sight for high responsivity and high bandwidth detectors.

关 键 词：超透镜 探测器 聚焦效率 量子效率 

分 类 号：TN366[电子电信—物理电子学]