上海光源BL02U2线站掠入射X射线衍射仪的研制  

Development of a grazing incidence X-ray diffractometer for BL02U2 at SSRF

作　　者：廖可梁 郑旭 李钊 薛志鹏 阴广志 张兴民 李晓龙 顾月良 朱佩平 LIAO Keliang;ZHENG Xu;LI Zhao;XUE Zhipeng;YIN Guangzhi;ZHANG Xingmin;LI Xiaolong;GU Yueliang;ZHU Peiping(Jinan Hanjiang Opto-electronics Technology Company Ltd.,Jinan 250002,China;Shanghai Advanced Research Institute,Chinese Academy of Sciences,Shanghai 201800,China)

机构地区：[1]济南汉江光电科技有限公司,济南250002 [2]中国科学院上海高等研究院,上海201800

出　　处：《核技术》2023年第12期1-9,共9页Nuclear Techniques

基　　金：国家自然科学基金项目(No.11875315);国家重点研发计划(No.2022YFA160390);济南市海右名家产业领军人才工程(2022年度);山东省企业技术创新项目(No.202350100372);山东省科技型中小企业创新能力提升工程(No.2023TSGC0093)资助。

摘　　要：上海光源BL02U2线站已经安装了两台德国HUBER公司的衍射仪,为了进一步满足用户对掠入射衍射实验方法的需求,在两台衍射仪之间安装了一台新的掠入射衍射仪。本文介绍了该掠入射衍射仪的整体方案,并针对高精度重载大行程位移台、探测器三维调节平台、样品台系统、控制系统等重要模块进行了详细的论述。该衍射仪的X射线能量范围为4.8~28 keV,探测器时间分辨率为50 ms,最大探测角度为52°,实现了与两台衍射仪的兼容运行,并以MoS2样品为例介绍了掠入射衍射仪的典型实验结果。目前,该掠入射衍射仪已经稳定运行超过两年,完善了上海光源的掠入射衍射实验条件,为材料表面科学研究提供了更丰富的实验平台。[Background]Two X-ray diffractometers manufactured by HUBER company are installed at BL02U2 beamline of Shanghai Synchrotron Radiation Facility(SSRF).[Purpose]This study aims to develop a new grazing incidence diffractometer installed between the two HUBER diffractometers to further satisfy the needs of users for grazing incidence diffraction experimental methods.[Methods]The overall scheme of the grazing incidence diffractometer was introduced,followed by detail discussion on several important modules such as high-precision,high-load and large-stroke linear stage,three-dimensional adjustment platform for a detector,sample stage system,and the control system.A compatible operation of the three diffractometers was realized,and the MoS_(2) sample was taken as an example to obtain a typical experimental result of the grazing incidence diffractometer.[Results]The grazing incidence X-ray diffractometer has been in operation for more than two years.The X-ray energy range of the diffractometer is 4.8~28 keV.The temporal resolution of the detector is 50 ms,and the maximum detection angle is 52°.Experimental results of MoS_(2) sample shown that the nanosheets are more likely to accumulate on the surface of silicon wafers along the(001)crystal plane.[Conclusions]The grazing incidence X-ray diffractometer developed in this study improves the experimental conditions for grazing incidence diffraction and expands the experimental platform for material surface science research at SSRF.

关 键 词：X射线衍射 同步辐射 精密仪器 

分 类 号：TL99[核科学技术—核技术及应用]