Controllable growth of wafer-scale PdS and PdS_(2) nanofilms via chemical vapor deposition combined with an electron beam evaporation technique  

作　　者：Hui Gao Hongyi Zhou Yulong Hao Guoliang Zhou Huan Zhou Fenglin Gao Jinbiao Xiao Pinghua Tang Guolin Hao 

机构地区：[1]School of Physics and Optoelectronics and Hunan Institute of Advanced Sensing and Information Technology,Xiangtan University,Xiangtan 411105,China [2]College of Physics and Technology&Guangxi Key Laboratory of Nuclear Physics and Technology,Guangxi Normal University,Guilin 541004,China [3]Department of Electronic and Electrical Engineering,University of Sheffield,Sheffield S102TN,UK [4]National Laboratory of Solid State Microstructures,Nanjing University,Nanjing 210093,China

出　　处：《Journal of Semiconductors》2023年第12期64-71,共8页半导体学报（英文版）

基　　金：supported by National Natural Science Foundation of China (No.11974301);Key Research and Development Program of Hunan Province (No.2022GK2007);Key Project from Department Education of Hunan Province (No.22A0123);Scientific Research Fund of Hunan Provincial Education Department (No.21B0136);National college students innovation and entrepreneurship training program (No.S202310530016)。

摘　　要：Palladium(Pd)-based sulfides have triggered extensive interest due to their unique properties and potential applications in the fields of electronics and optoelectronics.However,the synthesis of large-scale uniform PdS and PdS_(2)nanofilms(NFs)remains an enormous challenge.In this work,2-inch wafer-scale PdS and PdS_(2) NFs with excellent stability can be controllably prepared via chemical vapor deposition combined with electron beam evaporation technique.The thickness of the pre-deposited Pd film and the sulfurization temperature are critical for the precise synthesis of PdS and PdS_(2) NFs.A corresponding growth mechanism has been proposed based on our experimental results and Gibbs free energy calculations.The electrical transport properties of PdS and PdS_(2) NFs were explored by conductive atomic force microscopy.Our findings have achieved the controllable growth of PdS and PdS_(2) NFs,which may provide a pathway to facilitate PdS and PdS_(2) based applications for next-generation high performance optoelectronic devices.

关 键 词：PDS PdS_(2) NANOFILMS controllable growth chemical vapor deposition electron beam evaporation 

分 类 号：TN304[电子电信—物理电子学]