基于三氧化二铝-聚乙烯醇的光纤光栅湿度传感器  

Fiber Grating Humidity Sensor Based on Aluminum Trioxide-polyvinyl Alcohol Coating

作　　者：杨萌 邵敏[1] 刘颖刚[1] 张文松 路青青 YANG Meng;SHAO Min;LIU Yinggang;ZHANG Wensong;LU Qingqing(School of Science,Xi'an Shiyou University,Xi'an,China;Xi'an Optsensor Technology Co.,Ltd.,Xi'an,China)

机构地区：[1]西安石油大学理学院,西安 [2]西安和其光电科技股份有限公司,西安

出　　处：《光电技术应用》2023年第6期55-59,共5页Electro-Optic Technology Application

摘　　要：使用提拉法在腐蚀后的光纤布拉格光栅上涂覆三氧化二铝-聚乙烯醇薄膜,利用湿敏薄膜亲水性产生的应变,引起光纤布拉格光栅的中心波长发生漂移,实现了环境湿度的监测。实验中,光纤布拉格光栅的直径为50μm,三氧化二铝和聚乙烯醇溶液的混合比例为9:1,湿敏薄膜的涂覆厚度为80μm。实验研究结果表明,当湿度为40%RH-58%RH时,传感器的湿度灵敏度为6pm/%RH,当湿度为58%RH-70%RH时,湿度灵敏度为32.3pm/%RH。在25~70℃温度范围内,传感器的温度灵敏度为14.2pm/℃。稳定性实验表明传感器的不稳定性为0.0745%RH,呼吸测试表明该传感器的响应时间和恢复时间分别为1.94s和5.19s。该传感器制作简便、湿度灵敏度高、稳定性好,具有一定的应用潜力。A humidity sensor is proposed by coating aluminum oxide and polyvinyl alcohol film on the etched fiber Bragg grating by pulling technique.The strain generated by the hydro-philicity of the humidity sensitive film induces the central wavelength of fiber Bragg grating shifting,thus the environmental humidity monitoring is realized.In the experiment,the diameter of fiber Bragg grating is etched to 50μm by hydrofluoric acid,the mixture ratio of alu-minum oxide and polyvinyl alcohol solution is 9:1 and the coating thickness of humidity sensitive film is 80μm.The experimental results show that the humidity sensitivity is 6 pm/%RH in the humidity range of 40%RH-58%RH,the humidity sensitivity is 32.3 pm/%RH in the humidity range of 58%RH-70%RH,the temperature sensitivity of the sensor is 14.2 pm/°C in the temperature range of 25~70°C.The instability of the sensor is 0.0745%RH,and the human breathing testing shows that the response time and recovery time of the sensor are 1.94 s and 5.19 s,re-spectively.The sensor has advantages of simple fabrication,high humidity sensitivity,good stability,which indi-cates it has application potential.

关 键 词：光纤布拉格光栅 湿度传感器 三氧化二铝 聚乙烯醇 

分 类 号：TN253[电子电信—物理电子学]