不同摩擦副条件下二硫化钼薄膜的摩擦学性能研究  

Tribological Properties of MoS_(2)-Ti Films Sliding Against Different Mating Materials in Dry Sliding

作　　者：冯兴国[1] 郑玉刚[1] 汪科良 杨拉毛草 张凯锋[1] 周晖[1] FENG Xingguo;ZHENG Yugang;WANG Keliang;YANGLA Maocao;ZHANG Kaifeng;ZHOU Hui(Science and Technology on Vacuum Technology and Physical Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空与低温》2024年第1期31-38,共8页Vacuum and Cryogenics

摘　　要：为了研究MoS_(2)-Ti薄膜与9Cr18钢、W-DLC和DLC薄膜的摩擦学行为,分别采用磁控溅射技术和等离子体增强化学气相沉积技术在9Cr18钢表面沉积了MoS_(2)-Ti薄膜、W-DLC和DLC薄膜。用扫描电子显微镜(SEM)、能量色散谱仪(EDS)和X射线衍射仪(XRD)研究了薄膜的表面形貌、化学成分和相组成。利用纳米压痕仪和球-盘摩擦试验机对不同薄膜的纳米硬度和摩擦学性能进行了分析。研究结果表明,MoS_(2)-Ti薄膜与DLC薄膜的摩擦因数和磨损率最小。相比MoS_(2)-Ti薄膜与不镀膜的9Cr18钢球摩擦副,MoS_(2)-Ti薄膜与W-DLC薄膜摩擦副的摩擦因数和磨损率没有减小。MoS_(2)-Ti薄膜与W-DLC薄膜摩擦副的磨损机制为磨粒磨损和黏着磨损,与DLC薄膜摩擦副的磨损机制为黏着磨损。摩擦副表面沉积DLC薄膜有助于降低MoS_(2)-Ti薄膜的摩擦因数和磨损率。In order to study the tribological behavior of MoS_(2)-Ti thin films sliding against 9Cr18 steel,W-DLC and DLC thin films,MoS_(2)-Ti,W-DLC and DLC films are deposited on 9Cr18 steel by magnetron sputtering and plasma enhanced chemical vapor deposition technology respetively.The morphology,composition and phase structure of the films are characterized by SEM,EDS and XRD.The hardness and tribological properties of MoS_(2)-Ti films sliding against 9Cr18 steel,WDLC and DLC are investigated by hardness tester and ball-on-disc tribometer respectively.The results show that the MoS_(2)-Ti films sliding against DLC have the lowest friction coefficient and wear rate among these three mating materials.Compared to the MoS_(2)-Ti films sliding against the 9Cr18 ball,MoS_(2)-Ti films and W-DLC film does not reduce the friction coefficient and wear rate.The wear mechanism of MoS_(2)-Ti films and W-DLC is adhesive wear and abrasive wear,while the wear mechanism of MoS_(2)-Ti films and DLC is adhesive wear.

关 键 词：MoS_(2)-Ti薄膜 表面形貌 硬度 摩擦学性能 

分 类 号：O484[理学—固体物理]