PMN-PT单晶与Ag电极共烧界面结构及扩散行为研究  

Interfacial Structure and Diffusion Behavior of Co-Fired PMN-PT Single Crystal and Ag Electrode

作　　者：郑彧[1,2] 童亚琦 李辉 张微[1,2] 张璇 王震[1,2] ZHENG Yu;TONG Yaqi;LI Hui;ZHANG Wei;ZHANG Xuan;WANG Zhen(Beijing Sinoma Synthetic Crystals Co.,Ltd.,Beijing 100018,China;Sinoma Synthetic Crystals Co.,Ltd.,Beijing 100018,China)

机构地区：[1]北京中材人工晶体研究院有限公司,北京100018 [2]中材人工晶体研究院有限公司,北京100018

出　　处：《人工晶体学报》2023年第12期2167-2173,共7页Journal of Synthetic Crystals

基　　金：中国建材集团攻关专项(2021HX2122)。

摘　　要：采用丝网印刷工艺在PMN-PT弛豫铁电单晶晶片表面涂覆了中温及高温两种银浆,通过快速烧结工艺分别在650和850℃条件下制备了银电极。采用扫描电子显微镜观察银电极表面及金属-晶体界面的微观结构,采用能谱分析了界面的元素分布情况。银电极厚度为几十微米,呈多孔结构,与晶体结合良好。经过烧结后,晶体中的Pb、Nb、Ti等原子向银电极发生了迁移,而高温银浆烧结后在界面形成几微米厚的过渡层,晶体中原子向电极中的迁移大幅度减少。不同晶向的PMN-PT晶片在高温下向银电极扩散过程中具有很强的晶面效应,[110]方向晶体中Pb、Nb、Ti原子向电极中的扩散程度小于[100]方向晶体。The surface of PMN-PT relaxor ferroelectric single crystal was coated with medium and high temperature Ag paste by screen printing process.Ag electrodes were prepared by rapid sintering process at 650 and 850℃,respectively.The microstructure of Ag electrode surface and metal-crystal interface was observed by scanning electron microscope.The distribution of elements at the interface was analyzed by energy spectrum.The Ag electrode has a thickness of tens of microns,a porous structure,and a good combination with crystals.After sintering,atoms such as Pb,Nb and Ti in the crystal migrate to the Ag electrode,and a transition layer of several microns thickness is formed at the interface after sintering of the high temperature Ag paste,which greatly reduces the migration of atoms in the crystal to the electrode.PMN-PT wafers with different crystal orientation have a strong crystal face effect during the diffusion process to the Ag electrode at high temperature,and the diffusion degree of Pb,Nb and Ti atoms in the[110]direction crystal is smaller than that in the[100]direction crystal.

关 键 词：PMN-PT 弛豫铁电单晶 Ag电极 金属-晶体界面 原子扩散 

分 类 号：O782[理学—晶体学] TB34[一般工业技术—材料科学与工程]