小量程高灵敏度压阻式表压压力传感器的设计  

Design of Small-Range High-Sensitivity Piezoresistive Gauge Pressure Sensors

作　　者：高雅 许高斌 朱晓萌 张宇 关存贺 冯建国 GAO Ya;XU Gaobin;ZHU Xiaomeng;ZHANG Yu;GUAN Cunhe;FENG Jianguo(Micro Electromechanical System Research Center of Engineering and Technology of Anhui Province,School of Microelectronics,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学微电子学院,安徽省MEMS工程技术研究中心,合肥230009

出　　处：《真空科学与技术学报》2023年第11期947-953,共7页Chinese Journal of Vacuum Science and Technology

摘　　要：针对飞机供氧、液压、环控和燃油等系统故障预测与健康管理(PHM)对小量程压力传感器的重大需求,设计了一种新型梁膜复合结构微电子机械系统(MEMS)压阻式压力传感器,该研究通过小量程、高灵敏度的压力传感器力学机理分析和力学仿真建模,提出一种具有弧形膜和米字梁复合型结构,采用弧形硅杯支撑,通过结构和尺寸的优化设计以及压敏电阻位置的确定,在-2~12 KPa的量程内具有较高的灵敏度和线性度。利用ANSYS软件仿真分析得到设计的压力传感器灵敏度为21.801 mV/KPa,非线性度为0.02%。然后基于MEMS加工工艺设计了SOI表压压力传感器的工艺流程。A high-sensitivity pressure sensor with small measurement range was investigated for the failure prediction and health management(PHM)of aircraft oxygen supply,hydraulic,environmental control and fuel systems.The pressure sensor working mechanism and mechanical simulation were carried out using ANSYS software.Based on the simulation results,a novel MEMS piezoresistive pressure sensor was proposed,consisting of a composite structure of curved membrane and metered beam.The membrane was supported by cambered silicon cups.We optimized the design parameters of the sensor and determined the position of the resistors,resulting in a high sensitivity and a good linearity in the measurement range of−2 KPa~12 KPa.The sensitivity of the designed pressure sensor is obtained as 21.801 mV/KPa with a nonlinearity of 0.02%using ANSYS software simulation and analysis.Finally,we summarized the fabrication process of the designed pressure sensor based on the SOI substrate.

关 键 词：压阻式压力传感器 高灵敏度 小量程 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]