Development of an atmospheric fluorocarbon plasma jet generated by pulse modulated microwave discharge  

作　　者：陈思乐 任鑫柳 陈兆权 徐笑娟 程涛 李平 张冠军 卢新培 Sile CHEN;Xinliu REN;Zhaoquan CHEN;Xiaojuan XU;Tao CHENG;Ping LI;Guanjun ZHANG;Xinpei LU(School of Electrical and Information Engineering,Anhui University of Technology,Ma’anshan 243032,People’s Republic of China;School of Electrical and Information Engineering,Anhui University of Science and Technology,Huainan 232001,People’s Republic of China;State Key Laboratory of Electrical Insulation and Power Equipment,School of Electrical Engineering,Xi’an Jiaotong University,Xi’an 710049,People’s Republic of China;State Key Laboratory of Advanced Electromagnetic Engineering and Technology,Huazhong University of Science and Technology,Wuhan 430074,People’s Republic of China)

机构地区：[1]School of Electrical and Information Engineering,Anhui University of Technology,Ma’anshan 243032,People’s Republic of China [2]School of Electrical and Information Engineering,Anhui University of Science and Technology,Huainan 232001,People’s Republic of China [3]State Key Laboratory of Electrical Insulation and Power Equipment,School of Electrical Engineering,Xi’an Jiaotong University,Xi’an 710049,People’s Republic of China [4]State Key Laboratory of Advanced Electromagnetic Engineering and Technology,Huazhong University of Science and Technology,Wuhan 430074,People’s Republic of China

出　　处：《Plasma Science and Technology》2023年第11期91-100,共10页等离子体科学和技术（英文版）

基　　金：partly supported by National Natural Science Foundation of China(Nos.52207147 and 52177126);the Anhui Provincial Natural Science Foundation(Nos.2208085QE168 and 2108085ME180);the Anhui Provincial Natural Science Research Project of Higher Education(No.2022AH050301)。

摘　　要：Atmospheric fluorocarbon plasma plays an important role in the surface modification of insulating materials like polymers.The existing fluorocarbon plasma is usually generated by dielectric barrier discharge,which has a low concentration of reactive species and may cause insufficient surface fluorination.This work attempts to develop an atmospheric fluorocarbon plasma jet using a coaxial transmission line resonator by microwave discharge with locally enhanced electric field and high density.The gas temperature is reduced by pulse modulation technology.Three kinds of working gases,pure CF_(4),Ar/CF_(4)and He/CF_(4),are utilized to generate the atmospheric microwave fluorocarbon plasma jet.The discharge images,optical emission spectra,electron densities and gas temperatures are studied experimentally.The results show that the Ar/CF_(4)plasma jet has the best comprehensive performance,such as strong discharge intensity and controllable gas temperature.The electron density of the Ar/CF_4plasma jet has a magnitude of 10~(20)m^(-3),indicating a higher density than that of the frequently used dielectric barrier discharge.With the other conditions unchanged,the gas temperature at the end of the Ar/CF_(4)plasma jet can be reduced from 410.2 to 347.3 K by decreasing the duty cycle of the modulated pulse from 0.5 to 0.1.Thence,the microwave Ar/CF_(4)plasma jet is considered to be a promising fluorocarbon plasma source for surface fluorination of polymers.

关 键 词：microwave discharge atmospheric pressure plasma jet fluorocarbon plasma(Some figures may appear in colour only in the online journal) 

分 类 号：O53[理学—等离子体物理]