酞菁铜-氧化锌复合材料的制备及其气敏特性  

Preparation and Gas Sensing Properties of Copper Phthalocyanine-Zinc Oxide Composite Materials

作　　者：张轶群 王冲 邵秀峰 刘凤敏[2] 卢革宇[2] Zhang Yiqun;Wang Chong;Shao Xiufeng;Liu Fengmin;Lu Geyu(College of Communication Engineering,Jilin University,Changchun 130022,China;State Key Laboratory of Integrated Optoelectronics,College of Electronic Science and Engineering,Jilin University,Changchun 130012,China)

机构地区：[1]吉林大学通信工程学院,长春130022 [2]吉林大学电子科学与工程学院集成光电子学国家重点实验室,长春130012

出　　处：《微纳电子技术》2023年第12期1937-1942,共6页Micronanoelectronic Technology

基　　金：国家重点研发计划(2021YFB3201300);国家自然科学基金(62101212,62001187);吉林省教育厅科学技术研究项目(JJKH20231166KJ)。

摘　　要：将p型有机半导体材料酞菁铜(CuPc)和n型无机半导体材料氧化锌(ZnO)复合,得到p-n型的CuPc-ZnO复合材料,促进了目标气体在敏感层表面发生反应,提高了敏感层的气敏性能。在结晶度、形貌和结构等方面对制备的CuPc-ZnO敏感材料进行了详细表征,并对CuPc-ZnO复合材料的气敏性能进行了系统评估。结果表明无论是向CuPc中掺入少量的ZnO,还是向ZnO中掺入少量的CuPc,均可显著提高单一材料的气敏性能,这两种复合敏感材料对NO_(2)都展现了优异的选择性和良好的响应/恢复特性。其中,基于质量分数3%的CuPc/ZnO复合材料的传感器在150℃下对体积分数1×10^(-5)的NO_(2)的响应高达90,与基于纯ZnO的传感器相比,灵敏度明显提升,该传感器是检测NO_(2)的有利候选者。The p-n type CuPc-ZnO composite material was obtained by combining the p-type organic semiconductor copper phthalocyanine(CuPc)with the n-type inorganic semiconductor zinc oxide(ZnO),which promoted the reaction of the target gas on the surface of the sensing layer and improved the gas sensing performance of the sensing layer.The prepared CuPc-ZnO sensing materials were characterized in detail in terms of crystallinity,morphology and structure,and the gas sensing performance of the CuPc-ZnO composite materials was systematically evaluated.The results indicate that whether a small amount addition of ZnO to CuPc or a small amount addition of CuPc to ZnO,the gas sensing performance of pure material can be significantly improved.Both of composite sensing materials exhibit excellent selectivity and good response/recovery characteristics to NO_(2).Among them,the sensor based on the CuPc/ZnO composite material with a mass fraction of 3%has a response of up to 90 to NO_(2)with a volume fraction of 1×10^(-5)at 150℃,and the sensitivity is significantly improved compared with the sensor based on pure ZnO.The sensor is a favorable candidate for detecting NO_(2).

关 键 词：复合材料 传感器 酞菁铜 氧化锌 NO_(2) 

分 类 号：TB33[一般工业技术—材料科学与工程] TP212[自动化与计算机技术—检测技术与自动化装置]