电容式微机械超声换能器的声学封装方法  

Acoustic Packaging Method for Capacitive Micromechanical Ultrasonic Transducers

作　　者：卢小星 何常德[1] 党荣 崔建功[1] 张国军[1] 王任鑫[1] 杨玉华[1] 贾利成 张文栋[1] Lu Xiaoxing;He Changde;Dang Rong;Cui Jiangong;Zhang Guojun;Wang Renxin;Yang Yuhua;Jia Licheng;Zhang Wendong(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学省部共建动态测试技术国家重点实验室,太原030051

出　　处：《微纳电子技术》2023年第12期1989-1995,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金(61927807);山西省“1331工程”重点学科建设计划(1331KSC);国家重点实验室基金(2022-SYSJJ-05)。

摘　　要：针对水下超声检测的迫切应用需求,提出了一种电容式微机械超声换能器(CMUT)水密封装方法,选用聚氨酯(PU)和聚二甲基硅氧烷(PDMS)完成了CMUT封装。对封装后的CMUT主要性能参数进行测试和对比得出,PU和PDMS封装后的CMUT中心工作频率分别约为1.75和2.05 MHz,3 dB相对带宽比分别达到了97.14%和92.68%,展示出优异的宽频带特性。PU封装的CMUT最大发射电压响应和接收灵敏度较PDMS封装的CMUT分别高出0.14和1.21 dB,且其输出声压能力在1~20 cm范围内高于PDMS封装的CMUT。该研究结果验证了两种材料封装的CMUT都能够满足水下超声检测应用要求,为CMUT水密封装方法优化提供了理论和实验依据。For the urgent application requirement of underwater ultrasonic testing,a water sealing method of the capacitive micromechanical ultrasonic transducers(CMUTs)was proposed.Polyurethane(PU)and polydimethylsiloxane(PDMS)were used to complete the package of the CMUTs.After testing and comparing the main performance parameters of the packaged CMUTs,it is concluded that the central operating frequencies of the CMUTs packaged by PU and PDMS are about 1.75 and 2.05 MHz,respectively,and the 3 dB relative bandwidth ratios are 97.14%and 92.68%,respectively,showing excellent broadband characteristics.The maximum emission voltage response and receiving sensitivity of the PU-packaged CMUT are 0.14 and 1.21 dB higher than those of the PDMS-packaged CMUT,respectively,and the output sound pressure capability of the PU-packaged CMUT is higher than that of the PDMS-packaged CMUT in the range of 1-20 cm.The research results verify that the CMUTs packaged by two materials can meet the application requirements of underwater ultrasonic testing,and provide theoretical and experimental basis for the optimization of water sealing method of CMUTs.

关 键 词：电容式微机械超声换能器(CMUT) 微电子机械系统(MEMS) 水下超声检测 水密封装 聚氨酯(PU) 聚二甲基硅氧烷(PDMS) 

分 类 号：TB552[理学—物理] TH703[理学—声学]