液体毛细力驱动的微纳组装技术的研究进展  

Research Progress of Micro-Nano Assembly Technology Driven by Liquid Capillary Force

作　　者：高羡明 楚亚龙 朱朝飞 宋龙刚 董亮 徐磊磊 Gao Xianming;Chu Yalong;Zhu Zhaofei;Song Longgang;Dong Liang;Xu Leilei(College of Mechanical&Electrical Engineering,Shaanxi University of Science&Technology,Xi'an 710021,China)

机构地区：[1]陕西科技大学机电工程学院,西安710021

出　　处：《微纳电子技术》2023年第10期1551-1563,共13页Micronanoelectronic Technology

基　　金：国家自然科学基金(51905328);陕西省科学技术厅重点研发国际合作项目(2019KW-006);陕西省教育厅服务地方专项(20JC009)。

摘　　要：液体毛细力驱动下的微纳组装技术可以实现胶体颗粒、纤维、薄膜和芯片等微型结构的定向运输与自组装。基于毛细力的自组装技术研究涉及多学科交叉,对微纳芯片装配、纳米材料制备和大分子聚合物制备等领域的发展有重要意义。从理论和实验两方面综述了近年来毛细力自组装技术的研究重点,介绍了毛细力和液气界面形态学的研究模型;从组装对象的结构维度、材料的刚柔特性方面分析了毛细力自组装技术的特点和组装方法,并指出结构间距、材料性质、三相接触线形状、接触角、润湿性差异和液体体积等因素对自组装的影响。最后总结了毛细力自组装技术的优缺点以及应用中存在的问题,展望了未来微纳组装技术的研究重点。Micro-nano assembly technology driven by liquid capillary force can realize the directional transport and self-assembly of micro-structures such as colloidal particles,fibers,films and chips.The research of self-assembly technology based on capillary force involves multi-disciplinary cross,which is of great significance for the development of micro-nano chip assembly,nanomaterial preparation and macromolecular polymer preparation.The recent research focuses of capillary force self-assembly technology are reviewed from theoretical and experimental aspects,the research models of capillary force and morphology of liquid-gas interface are introduced.The characteristics and assembly methods of the capillary force self-assembly technology are analyzed from the structural dimension of the assembly object and the rigid and flexible characteristics of the material.And the influences of the structure spacing,material properties,shape of the threephase contact line,contact angle,wettability difference and liquid volume on the self-assembly are pointed out.Finally,the advantages and disadvantages of the capillary force self-assembly technology and the existing problems in application are summarized,and the future research focus of micro-nano assembly technology is prospected.

关 键 词：毛细力 自组装技术 微纳组装 胶体颗粒 纳米材料 大分子聚合物 

分 类 号：TN305[电子电信—物理电子学]