基于纳米裂纹的MEMS二维风速风向传感器  

MEMS Two-Dimensional Wind Speed and Direction Sensor Based on Nanocracks

作　　者：杨少琪 张弛 曹书野 朱一柯 孙鹏[1] 刘军山[1] Yang Shaoqi;Zhang Chi;Cao Shuye;Zhu Yike;Sun Peng;Liu Junshan(Key Laboratory for Micro/Nano Technology and System of Liaoning Province,School of Mechanical Engineering,Dalian University of Technology,Dalian 116024,China)

机构地区：[1]大连理工大学机械工程学院辽宁省微纳米技术及系统重点实验室,辽宁大连116024

出　　处：《微纳电子技术》2023年第10期1619-1625,共7页Micronanoelectronic Technology

基　　金：国家重点研发计划项目(2020YFB2008502);国家自然科学基金(51875083)。

摘　　要：风速、风向信号的采集在工业、医疗与气象等领域具有重要意义。研发了一种基于纳米裂纹的微电子机械系统(MEMS)二维风速风向传感器。利用纳米裂纹超高灵敏度的优点,设计了纤毛-悬臂梁结构用于风速、风向信号采集。通过有限元数值仿真分析确定传感器的纤毛直径、高度和悬臂梁长度等结构参数。然后,采用聚二甲基硅氧烷(PDMS)衬底制备、聚酰亚胺粘附、金薄膜沉积、金薄膜图案化以及纳米裂纹工艺流程制备了纳米裂纹金薄膜。采用该纳米裂纹金薄膜,利用MEMS工艺技术制作了基于纳米裂纹的MEMS二维风速风向传感器,并通过自主研制的测试平台测试了传感器的风速和风向性能。实验结果表明,制备的二维风速风向传感器能够稳定测量2~7 m/s的风速信号,并具有误差不超过15°的风向识别能力。The acquisition of wind speed and direction signal is of great significance in various fields such as industry,medicine and meteorology.A micro-electromechanical system(MEMS)two-dimensional wind speed and direction sensor based on nanocracks was developed.By taking advantage of the ultra-high sensitivity of nanocracks,a cilia-cantilever beam structure was designed for wind speed and direction signal acquisition.Through finite element numerical simulation analysis,the structural parameters of the sensor,such as the diameter and height of the cilia and the length of the cantilever beam were determined.Then,nanocrack gold films were prepared by polydimethylsiloxane(PDMS)substrate preparation,polyimide adhesion,gold film deposition,gold film patterning and nanocrack technology process.With the nanocrack gold film,the MEMS two-dimensional wind speed and direction sensor based on nanocracks was fabricated by MEMS technology.And the wind speed and direction performances of the sensor were tested by a self-developed testing platform.The experimental results show that the fabricated two-dimensional wind speed and direction sensor can stably measure wind speed signals from 2 m/s to 7 m/s,and has wind direction recognition capability with an error no more than 15°.

关 键 词：风速风向传感器 微电子机械系统(MEMS) 纳米裂纹 图案化 有限元仿真 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH703[自动化与计算机技术—控制科学与工程]