基于卓越绩效模式测量分析改进方法对光罩静电损伤的改善研究  

Study on Improvement of Electrostatic Damage of Mask Based on Measurement Analysis and Improvement Method of Performance Excellence Model

作　　者：张超义 梁伟 闫超[5] 刘靖宇 牛锋 刘岗[1,2] Zhang Chao-yi;Liang Wei;Yan Chao;Liu Jing-yu;Niu Feng;Liu Gang(University of Science and Technology of China;Institute of Solid State Physics,Chinese Academy of Sciences;Anhui Promotion Center for Technology Achievements Transfer;Anhui Academy of Science and Technology;Graduate Student Department of Hefei Institute of Physical Science,Chinese Academy of Sciences;Anhui Win-win Recycling Resources Group Co.,Ltd.)

机构地区：[1]中国科学技术大学 [2]中国科学院合肥物质科学研究院固体物理研究所 [3]安徽省科技成果转化促进中心 [4]安徽省科学技术研究院 [5]中国科学院合肥物质科学研究院研究生处 [6]安徽双赢再生资源集团有限公司

出　　处：《中国标准化》2024年第1期182-188,共7页China Standardization

摘　　要：卓越绩效模式是企业经营管理成熟度模型,也是国家省市县区各级质量奖评审依据,其测量分析改进的方法可应用于企业的组织管理和质量改善方向。光罩(mask)又称掩膜版,由于光罩在无尘室环境中极化作用、摩擦、静电传导等原因,静电电荷会在光罩电路(pattern)铬膜上积聚,光罩不同电路所积聚电荷量不同从而形成电压差,电路之间电压差超过电路铬膜的击穿电压时,光罩电路会被静电击穿从而发生静电损伤。本文基于卓越绩效模式测量分析改进的方法,通过对光罩静电损伤分析研究,使用帕申定律、汤森放电理论和“5M1E”的理论,从产品设计开发和生产两方面提出改善光罩静电损伤对策,确定改进的绩效测量指标,提高产品质量,提高顾客满意度和忠诚度,降低返工成本。Performance Excellence Model is the maturity model of enterprise management,and the basis for the evaluation of national quality awards at levels of provinces,cities,counties and districts.The method of measurement,analysis and improvement can be applied to the direction of enterprise organization management and quality improvement.Mask is also known as photomask plate.Due to the polarization,friction and electrostatic conduction of the mask in the clean room environment,electrostatic charge will accumulate in the chromium film of the mask pattern,and the amount of charge accumulated in different patterns of the mask will form a voltage difference.When the voltage difference between patterns exceeds the breakdown voltage of the chromiumfilm of mask pattern,the pattern of mask will be broken by static electricity,resulting in electrostatic damage.Based on the measurement,analysis and improvement method of Performance Excellence Model,as well as the analysis and research of the electrostatic damage of mask,the paper puts forward the measures to improve the electrostatic damage of mask from two aspects of product design and mask production,and determines the improved performance measurement indicators,in order to improve product quality,enhance customer satisfaction and loyalty,and reduce the rework cost.

关 键 词：卓越绩效模式 光罩 静电损伤 测量分析改进 

分 类 号：TN873[电子电信—信息与通信工程] O441.2[理学—电磁学]