超声振动对于激光烧蚀铝表面形貌研究  

Experimental Study of Ultrasonic Vibration on the Surface Morphology of Laser Ablated Aluminum

作　　者：张明月 王岩[1,2] 董颖怀 李跃华[3] 赵静楠 王友辉 Zhang Mingyue;Wang Yan;Dong Yinghuai;Li Yuehua;Zhao Jingnan;Wang Youhui(Tianjin University of Science and Technology,Tianjin 300222,China;Tianjin Key Laboratory of Integrated Design and On-line Monitoring for Light Industry&Food Machinery and Equipment,Tianjin 300222,China;Tianjin Institute of Aerospace Mechanical and Electrical Equipment,Tianjin 300301,China)

机构地区：[1]天津科技大学机械工程学院,天津300222 [2]天津市轻工与食品工程机械装备集成设计与在线监控重点实验室,天津300222 [3]天津航天机电设备研究所,天津300301

出　　处：《应用激光》2023年第11期123-126,共4页Applied Laser

基　　金：天津市自然科学基金项目(19JCZDJC33200);天津市自然科学基金项目(18JCQNJC05200);天津市自然科学基金项目(18JCYBJC88900);天津市教委科研计划项目(2018KJ116);2021年天津市研究生科研创新项目资助(2021YJSS043)。

摘　　要：对超声振动辅助激光加工铝表面的微观形貌进行研究,分析材料表面激光烧蚀阈值的计算方法,通过试验研究了激光脉冲频率和超声振动对激光烧蚀凹坑直径的影响。研究发现,引入超声振动后,凹坑直径降低0.67~2.82μm,烧蚀阈值由5.76 J/cm^(2)增加到6.52 J/cm^(2),扫描速度100 mm/s时,轨迹宽度由46.3μm增加到62.2μm,并可以制备一种特殊椭球体结构,降低表面粗糙度。This paper investigates the microstructure alterations of aluminum surfaces subjected to ultrasonic vibration-assisted laser processing.It encompasses an analysis on laser ablation thresholds computation on material surfaces and scrutinizes experimentally the influence of laser pulse frequency and ultrasonic vibration on the diameter of laser ablation craters.Results revealed that ultrasonic vibration application led to a decrease in crater diameter by 0.67μm to 2.82μm,an elevation in the ablation threshold from 5.76 J/cm^(2)to 6.52 J/cm^(2),and an increase in trajectory width from 46.3μm to 62.2μm at a scanning speed of 100 mm/s.Furthermore,it enabled the formation of a unique ellipsoidal structure exhibiting reduced surface roughness.

关 键 词：超声振动 复合加工 脉冲激光 表面形貌 

分 类 号：TN249[电子电信—物理电子学]