粉末样品制备方法对扫描电子显微镜成像质量的影响  

Effect of Different Preparation Methods for Powder Samples on Imaging Quality of Scanning Electron Microscope

作　　者：王馨楠 WANG Xinnan(Analysis&Research Center of the School of Chemical Engineering,Dalian University of Technology,Dalian 116024,Liaoning China)

机构地区：[1]大连理工大学化工学院分析测试中心,辽宁大连116024

出　　处：《分析测试技术与仪器》2023年第4期400-406,共7页Analysis and Testing Technology and Instruments

摘　　要：纳米粉末材料是化学化工领域常见的样品,在其扫描电子显微镜表征中,通常会遇到以下几个问题:二次电子产率低,粉末聚集结块从而导致无法观察纳米形貌,以及荷电效应等.以二氧化硅小球粉末、ZSM-5分子筛纳米片以及聚苯乙烯小球粉末为研究对象,在不镀金属膜的前提下,分别采用粉末直接涂抹在导电碳胶或银胶上和溶液分散后滴涂在不同基底上的方法进行样品制备,比较了直接涂抹和分散后滴涂在基底上两种方法对扫描电子显微镜成像的影响.结果表明,样品经过溶液分散能够有效的减小粉末的团聚,其中,滴涂在硅片基底上可以减小荷电效应和背景影响,清晰观察到粉末的纳米级形貌.The nano-sized powder materials are common samples in the field of chemistry and chemical industry.In the scanning electron microscopy(SEM)characterization of the nano-sized power materials,the following problems are usually emerged,such as low secondary electron yields,powder agglomeration resulting in the inability to observe nanomorphology,charging effects and so on.Silica spheres powder,ZSM-5 zeolite nanosheets and polystyrene spheres powder were used as the SEM samples.The SEM samples on substrates were unsprayed with a metal film,and were prepared by direct-coating the powder onto the conductive tap or silver paint and by drop-coating the dispersing solution onto different substrates,respectively.The effect of two preparation methods on SEM imaging,direct-coating and dropcoating of dispersing solution on a substrate,were compared.The results showed that the dispersing solution of the samples can effectively reduce the agglomeration of the powders,in which the drop-coating on the silicon wafer substrate could reduce the charging effect and background effect,and the nanoscale morphology of the powder can be clearly observed.

关 键 词：扫描电子显微镜 粉末样品 样品制备 

分 类 号：O657[理学—分析化学] TN16[理学—化学]