半导体风管用ECTFE粉末涂料的制备及性能  

Preparation and Performance of ECTFE Powder Coating for Semiconductor Air Duct

作　　者：张万里[1] 姚卫国 沈翔[1] 孙斌[1] 陈科[1] ZHANG Wanli;YAO Weiguo;SHEN Xiang;SUN Bin;CHEN Ke(Zhejiang Chemical Industry Research Institute Co.,Ltd.,Hangzhou 310023,China;Sinochem Lantian Fluoro Materials Co.,Ltd.,Shangyu 312369,Zhejiang,China)

机构地区：[1]浙江省化工研究院有限公司,杭州310023 [2]中化蓝天氟材料有限公司,浙江上虞312369

出　　处：《材料导报》2023年第S02期578-581,共4页Materials Reports

摘　　要：采用涂料级的ECTFE树脂,通过气流粉碎得到粒径大小、分布合适的树脂粉末,将其与多种助剂混合后得到ECTFE涂料,通过静电喷涂制备成涂层并对涂层性能进行多方面的测试。结果表明:粉末涂料的粒径大小及分布、流动性和上粉率都能满足静电喷涂工艺的要求,制备的ECTFE涂层具有很好的附着力及硬度,耐中性盐雾性能、耐化学性及防火阻燃性能均相当优异,能够满足半导体行业风管防腐的要求。Using coating grade ECTFE resin,a powder with appropriate particle size and distribution is obtained through airflow pulverization.It is mixed with various additives to obtain an ECTFE coating.The coating is prepared through electrostatic spraying and its performance is tested in various aspects.The results show that the particle size and distribution,flowability,and powder loading rate of the powder coating can meet the requirements of the electrostatic spraying process.The prepared ECTFE coating has good adhesion and hardness.The neutral salt spray resistance,chemical resistance,and fire retardant performance are all quite excellent,which can meet the anti⁃corrosion requirements of the semiconductor industry’s air ducts.

关 键 词：半导体风管 粉末涂层 ECTFE涂料 静电喷涂 防火阻燃 

分 类 号：TQ630.1[化学工程—精细化工]