针对半导体气体传感器的电信号采集装置  

Electrical signal acquisition device for semiconductor gas sensors

作　　者：段奇 王宇轩 李栋辉 刘东明 韩丹 桑胜波[1,2] DUAN Qi;WANG Yuxuan;LI Donghui;LIU Dongming;HAN Dan;SANG Shengbo(Shanxi Key Laboratory of Micro Nano Sensors&Artificial Intelligence Perception,Taiyuan 030024,China;College of Electronic Information and Optical Engineering,Taiyuan University of Technology,Taiyuan 030024,China)

机构地区：[1]微纳传感与人工智能感知山西省重点实验室,山西太原030024 [2]太原理工大学电子信息与光学工程学院,山西太原030024

出　　处：《传感器与微系统》2024年第1期88-90,98,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(52375572);山西省重点研发计划资助项目(202102030201003);山西省水利科学技术研究与推广项目(2023GM16);山西浙大新材料与化工研究院研发项目(2022SX—AT001)。

摘　　要：针对半导体气体传感器对环境敏感、电阻跨度大的特性,设计了一种针对半导体气体传感器灵敏度高、体积小、适用性广的电信号采集装置。采用多档位分压法实现对欧姆(Ω)至吉欧姆(GΩ)范围的电阻测量,通过滤波与温湿度补偿消除物理、温湿度干扰;同时装置具有本地报警、上位机报警、气室等设计。本文装置实现了半导体气体传感器的精确测量,同时设计集成电路,将传感器封装为可实际应用系统,采用国产EDA与核心芯片设计,有效填补了该领域的空白。Aiming at the characteristics of semiconductor gas sensor,such as sensitive to environment and large resistance span,an electrical signal acquisition device based on semiconductor gas sensor is designed,which has the characteristics of high sensitivity,small size and wide applicability.The device uses the multi-gear voltage division method to realize the resistance measurement in the range of Ω~GΩ,and eliminates the interference of physical,temperature and humidity by filtering algorithm and temperature and humidity compensation algorithm.At the same time,the device is equipped with an local alarm,upper computer alarms and an air chamber.The device realizes accurate measurement of semiconductor gas sensors,and at the same time designs integrated circuits to package the sensor into a practical application system.The device adopts a domestic EDA and core chip design,which effectively fills the gap in this field.

关 键 词：半导体气体传感器 嵌入式 大电阻测量 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]