基于基片集成波导加载开口环的介电测量传感器  

Dielectric measurement sensor based on SIW loaded split-ring

作　　者：赵文强[1] 武鑫磊 景辉辉 陆畅 张斌珍[1] 段俊萍[1] ZHAO Wenqiang;WU Xinlei;JING Huihui;LU Chang;ZHANG Binzhen;DUAN Junping(Key Laboratory of Instrumentation Science&Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《传感器与微系统》2024年第1期107-110,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(52175555);国家自然科学基金创新群体(51821003);山西省重点研发项目(国际合作)(201803D421043);山西省“1331工程”重点学科建设基金资助项目;山西省基金面上资助项目(20210302123074)。

摘　　要：基于微扰理论,提出了一种在基片集成波导(SIW)结构上加载椭圆形开口环的小型化介电常数测量传感器。在传感器表面刻蚀椭圆开口环,增加电流路径的同时,降低工作频率,实现器件的小型化。在中心区域挖有通孔,当放入具有不同介电常数的待测物体时,传感器的S参数会发生改变。通过仿真软件对传感器进行分析,介电常数实部从1至10变化,频率的相对偏移达到32.4%。测量结果表明:传感器对介电常数的测量误差小于3%,具有很好的测量效果。Based on perturbation theory,a miniaturized permittivity measurement sensor with elliptical split-ring loaded on substrate integrated waveguide(SIW)structure is proposed.The elliptical split-ring is etched on the surface of the sensor,which increases current path and at the same time reduces the working frequency,so as to realize the miniaturization of the device.The center area of the sensor has a through hole.When the objects to be detected with different permittivity are put into sensor,the S parameters of the sensor will change correspondingly.When the real part of the permittivity changes from 1 to 10 after the sensor is analyzed by simulation software,the relative frequency offset is 32.4%.The measurement results show that measurement error of the permittivity of the sensor is less than 3%,which has good measurement effect.

关 键 词：微扰理论 基片集成波导 介电常数 小型化 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN212[自动化与计算机技术—控制科学与工程]