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作 者:高书苑 陈少飞 李明[1] 高超 GAO Shuyuan;CHEN Shaofei;LI Ming;GAO Chao(School of Mechanical and Rail Transit,Changzhou University,Changzhou 213164,China;Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100094,China;Haining Academy of Integrated Circuit and Advanced Manufacturing,Jiaxing 314400,China)
机构地区:[1]常州大学机械与轨道交通学院,江苏常州213164 [2]中国科学院微电子研究所,北京100094 [3]海宁集成电路与先进制造研究院,浙江嘉兴314400
出 处:《传感器与微系统》2024年第1期124-127,共4页Transducer and Microsystem Technologies
基 金:国家自然科学基金资助项目(52105541);江苏省基础研究计划资助项目(BK20200983);常州市领军型创新人才引进培育项目(CQ20210082);江苏省研究生科研与实践创新计划资助项目(KYCX23_3092)。
摘 要:针对偏振调制测距系统直接测量光强极小值分辨率低且扫频速度慢的问题,提出了基于增强微分的偏振测距算法。首先,根据测距原理分析了频率测量对距离测量精度的影响;然后,利用采样信号的对称特性提出增强微分算法,进行算法的原理、步骤和关键参数分析,获得最佳参数组合范围;最后,搭建了偏振调制测距系统,验证提出的参数组合,并与拟合微分法进行测距精度和速度对比实验。实验结果表明:提出的方法相比于拟合微分法测距重复性由58μm提高至6.8μm,平均绝对测距精度提升至0.207mm,扫频步数由1100个减少至250个,测量时间减少至2s,精度和速度得到有效提升。Aiming at problem of low resolution and slow frequency sweeping speed while polarization modulation ranging system directly measuring light intensity minima,a polarization ranging algorithm based on the enhanced differentiation is proposed.Firstly,the influence of frequency measurement on distance measurement precision based on ranging principle is analyzed.Then,an enhanced differential algorithm using the symmetry characteristics of sampling signals is proposed.The principle,steps,and key parameters of this algorithm are analyzed to obtain an optimal parameter combination range.Finally,a polarization modulation ranging system is constructed to verify these parameter combinations.Comparative experiments on ranging precision and speed with a fitted differential method are also conducted.Experimental results indicate that compared with the fitting differential method,the proposed method improves ranging repeatability from 58μm to 6.8μm.Average absolute ranging precision is improved to 0.207 mm,and the number of sweeping steps is reduced from 1100 to 250,measurement time is reduced to 2 s,both precision and speed are significantly enhanced.
分 类 号:TP391[自动化与计算机技术—计算机应用技术]
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