Study of a collisionless magnetized plasma sheath with nonextensively distributed species  

作　　者：R PAUL K DEKA G SHARMA R MOULICK S ADHIKARI S S KAUSIK B K SAIKIA 

机构地区：[1]Centre of Plasma Physics,Institute for Plasma Research,Assam 782402,India [2]Institute for Energy Technology,Instituttveien 8,Kjeller 2007,Norway

出　　处：《Plasma Science and Technology》2023年第12期14-23,共10页等离子体科学和技术（英文版）

摘　　要：A weakly magnetized sheath for a collisionless, electronegative plasma comprising positive ions,electrons, and negative ions is investigated numerically using the fluid approach. The electrons are considered to be non-Maxwellian in nature and are described by Tsalli's distribution. Such electrons have a substantial effect on the sheath properties. The study also reveals that non-Maxwellian distribution is the most realistic description for negative ions in the presence of an oblique magnetic field. In addition to the negative ion temperature, the sheath potential is also affected by the nonextensive parameters. The present research finds application in the plasma processing and semiconductor industry as well as in space plasmas.

关 键 词：magnetised plasma sheath electronegative plasma non-extensive distribution 

分 类 号：O53[理学—等离子体物理]