真空计量的量子化研究进展  

Research Progress in Quantization of Vacuum Metrology

作　　者：郑一鸣 王旭迪[1] 吴俊 ZHENG Yi-ming;WANG Xu-di;WU Jun(School of Mechanical Engineering,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学机械工程学院,安徽合肥230009

出　　处：《真空》2023年第6期9-14,共6页Vacuum

摘　　要：欧洲计量创新与研究计划(EMPIR)的量子帕斯卡(Quantum Pascal)项目旨在开发基于光子的真空计量标准,以将压力的国际制单位(Pa)转换为气体密度单位。该项目的主要研究方向包括折射率法、吸收光谱法和冷原子法等基于光学方法的量子真空标准,这些方法各有特点,且都具备高精度和高可重复性的优点。其中,折射率法和吸收光谱法主要基于气体分子在真空中的相互作用机制进行测量,而冷原子法则是利用玻色-爱因斯坦凝聚态的性质进行测量。本文对这些原理和应用装置进行了详细介绍,为量子真空计量技术的发展提供了有益的参考。这些技术的发展将有助于实现更准确的真空测量和更精确的科学研究,对于半导体制造、材料科学、量子信息等领域都具有重要意义。The Quantum Pascal project under the european metrology programme for innovation and research(EMPIR)aims to develop a photon-based vacuum measurement standard for converting the international unit of pressure(Pa)into a unit of gas density.The project focuses on various optical methods,including the refractive index method,absorption spectroscopy,and the cold atom method,to establish quantum vacuum standards.These methods offer high precision and repeatability,and each has its unique features.The refractive index method and absorption spectroscopy rely on the interaction mechanism of gas molecules in vacuum,while the cold atom method uses the properties of Bose-Einstein condensed matter.In this paper,these principles and application devices are introduced in detail,providing a valuable reference for the development of quantum vacuum metrology technology.The advancement of these technologies will enable more accurate vacuum measurements and more precise scientific research,which is crucial for various fields,such as semiconductor manufacturing,materials science,and quantum information.

关 键 词：真空计量 量子真空 折射率法 冷原子 吸收光谱法 

分 类 号：TB771[一般工业技术—真空技术]