拉曼检测仪器用干涉滤光片综述  

Review on Interference Filters for Raman Detection Instruments

作　　者：刘博文 高鹏[1] 王瑞生[1] 赵帅锋[1] 任少鹏[1] 董明 陈一凡 秦瑞 LIU Bo-wen;GAO Peng;WANG Rui-sheng;ZHAO Shuai-feng;REN Shao-peng;DONG Ming;CHEN Yi-fan;QIN Rui(Shenyang Instrument Science Research Institute Co.,Ltd.,Shenyang 110043,China)

机构地区：[1]沈阳仪表科学研究院有限公司,辽宁沈阳110043

出　　处：《真空》2023年第6期37-41,共5页Vacuum

摘　　要：介绍了拉曼检测仪器用干涉滤光片(简称拉曼滤光片)的应用场景和功能,研究分析了其光谱指标对拉曼检测仪器性能和精度的影响,包括光谱透射率、光谱反射率、背景截止度、截止陡度等。为满足拉曼滤光片光学指标的精准光谱测试需求,推荐了分光光度计测试及相关测试参数的设置方法。此外,还介绍了采用溅射镀膜工艺制造高性能拉曼滤光片的方法及优势。最后,对拉曼滤光片的发展进行了总结和展望,为拉曼滤光片在科学研究和产业化应用中提供参考。This paper introduces the application scenarios and functions of interference filters in Raman detection instruments(abbreviated as Raman filters),and analyzes the influence of its spectral indicators on the performance and accuracy of Raman detection instruments,including spectral transmittance,spectral reflectance,background,steepness,etc.In order to meet the precise spectral test requirements of Raman filter performance indicators,the spectrophotometer detection and the setting method of related detection parameters are recommended.In addition,the method and advantages of using sputtering coating technology to manufacture high-performance Raman filters are introduced.Finally,the development of Raman filters is summarized and prospected,so as to provide references for Raman filters in scientific research and industrial applications.

关 键 词：拉曼检测仪器 拉曼滤光片 光学指标 分光光度计 溅射镀膜 

分 类 号：O432[机械工程—光学工程]