低比功率宽工作能力的螺杆真空泵设计与试验  

Design and Test of Screw Vacuum Pump with Low Specific Power And Wide Working Capacity

作　　者：巫修海[1] 马云芳[2] 陈海垚 WU Xiu-hai;MA Yun-fang;CHEN Hai-yao(Department of Mechanical and Electrical Engineering,Taizhou Vocational and Technical College,Taizhou 318000,China;Department of Information Technology Engineering,Taizhou Vocational and Technical College,Taizhou 318000,China;TaiZhou XingGuang Vacuum Equipment Co.,Ltd.,Taizhou 318012,China)

机构地区：[1]台州职业技术学院机电工程学院,浙江台州318000 [2]台州职业技术学院信息技术工程学院,浙江台州318000 [3]台州市星光真空设备制造有限公司,浙江台州318012

出　　处：《真空》2023年第6期71-77,共7页Vacuum

基　　金：浙江省台州市科技计划项目(21gya36)。

摘　　要：为开发能高效适应0.1~100kPa宽工作压力范围,且能兼顾预期极限真空工艺工况的螺杆真空泵,设计了分段式渐进变化螺距螺杆。其第一部分导程由小到大变化,位于吸气端,从第二部分开始导程由大到小渐进变化,该构造确保了螺杆良好的动平衡性,可保证齿面结构完整;前两级导程决定了螺杆真空泵的吸气量,相邻导程比率决定了压缩能力;末端导程螺距变化小,螺杆齿宽大,保证了螺杆的加工性能。试验证明采用分段式渐变螺杆转子的螺杆真空泵,在整个工作压力区域都能保持较大的抽速,并且可依据工作预期优化螺距参数,极大降低了设定工作压力区域的比功率,从而提高抽气效率,大幅降低驱动功率,使泵运行效果良好。In order to develop a screw vacuum pump,which can efficiently adapt to a wide working pressure range of 0.1-100kPa and meet the expected extreme vacuum process conditions,a segmented progressive pitch screw rotor is designed.The lead of the first part,which is located at the suction end,changes from small to large,while the leads from the second part,gradually change from large to small.This lead structure ensures good dynamic balance of the screw rotor and the integrity of the tooth surface structure.The first two stages of leads determine the suction capacity of the screw vacuum pump,and the ratio of adjacent leads determines the compression capacity.The end lead pitch changes little,and the screw tooth width is large,ensuring the processing performance of the screw.The experiment show that the screw vacuum pump using a segmented gradient screw rotor can maintain a relatively high pumping speed throughout the entire working pressure range,and the pitch parameters may be optimized according to work expectations,which can greatly reduce the specific power in the set working pressure range,improve the pumping efficiency,significantly reduce the driving power and achieve good pump operation effect.

关 键 词：螺杆真空泵 比功率 自平衡转子 内体积压缩比 

分 类 号：TB752.2[一般工业技术—真空技术] TB752.2